传感器和馈入件
炫酷抽屉双传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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炫酷抽屉双传感器设计用于在真空室中需要第二晶体的关键过程。拥有水冷浇铸不锈钢传感器壳体、两个炫酷抽屉晶体支架以及一个气动闸门，可以为坚固耐用的传感器头提供超高的备份晶体可靠性。腔室中没有同轴电缆，可以进行更纯净、更可靠的真空系统安装。
功能
- 双晶体
- 炫酷抽屉晶体支架
- 无内部电缆
- 晶体闸
- 还提供：CF40 馈入装置和 2.54 cm (1 in.) 螺栓馈入装置
- 在配有焊接式 CF40 法兰时可烘烤
- 在配有压缩接头时可调长度
- 焊接为客户指定长度的传感器/馈入装置组合
规格
| 冷却水 | Minimum water flow of 150 to 200 cm³/min using 1/8 in. O.D. tube, 30°C max. (Do not allow to freeze) |
| 材料 | 304 stainless steel, ceramic, beryllium nickel |
| 1 in. 螺栓和压缩接头密封端接 | |
| 温度 | Operational environment to 300° C with water cooling or 165° C without |
零件编号
Accessories
Consumables
| Part Number | Description |
| 750-420-G1 | Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors) |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
| Part Number | Description |
| 123259 | Cool Drawer Sensor Crystal Retainer |
| 123261 | Cool Drawer sensor Drawer |
| 123260 | Cool Drawer Sensor Drawer and Retainer Combo |
| 147206-2 | * Bellows with 35 in. tube |
| 147207 | Bellows and cover assembly (Includes all parts marked with *) |
| 147401 | Shutter |
| 147402 | Link |
| 147403 | * Actuator |
| 147406 | * Bellows support |
| 147407 | * Bellows Cover |
| 147408 | * Threaded shaft |
| 147411 | Spacer |
| 147424 | * Bellows tube |
| 082-026 | # 2-56 Nut (part of heat shield assembly) |
| 082-064 | * Lockwasher |
| 084-205 | * #4-40 x 3/16 Phillips screw |
| 800128 | #4 Lockwasher |
| 800371 | Shoulder Screw |
| 800372 | Washer |
| 800416 | * 6-32 x 3/16 in. set screw |
| 803313 | * Spring |
| 123223-2 | Conduit brazed assembly - short pin |
| 803102 | O-ring for 5 port adjustable feedthrough |
| 803261 | Washer for 5 port adjustable feedthrough |
下载
手册
3D文件
其他
Techincal Note - Crystal Replacement (English)
pdf
•
45,6 KB
•
英文
Technical Note - Cool Drawer (Maxtek) Sensor Head vs Temescal Sensor Head (English)
pdf
•
53,9 KB
•
英文
Technical Note - Cool Drawer Sensor Head Termination of Electrical Connections (English)
pdf
•
295,6 KB
•
英文
Technical Note - Dual Sensor Head -Replacement of Bellows Assembly (English)
pdf
•
46,2 KB
•
英文
Technical Note - Sensor Alignment (English)
pdf
•
32,4 KB
•
英文
Technical Note - Use of Cool Drawer (Maxtek) Sensor Heads in a Sputtering Environment (English)
pdf
•
32,6 KB
•
英文
What is a QCM Sensor?
pdf
•
531,6 KB
•
英文
