传感器和馈入件
CrystalSix® 传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON CrystalSix 晶体对于要求连续监控速率的长时间过程非常重要。CrystalSix 传感器在一个传感器头中含有 6 颗石英监控器晶体，为 OLED、MBE、太阳能、长时间光学镀膜或其他需要长时间腔室排气的过程提供安全性。与 INFICON 薄膜沉积监控器结合使用时，CrystalSix 在当前晶体失效或不稳定的情况下，会自动将新的晶体转动到适当的位置。晶体更换是自动完成的，不会中断您的过程，支持持续监控沉积速率。
晶体索引通过气动机制完成。相比同类装置使用的昂贵的真空发热电机，这种气动马达可提供更好的晶体热稳定性。一个 8 英寸的水冷却管保持传感器头的热稳定性，并提供晶体位置的灵活性。
与某些 INFICON 薄膜控制器结合使用时，传感器提供位置反馈，因此可针对特定的材料安排特定的位置。
功能
- 装有 6 颗晶体，可进行可靠的自动转换，从而最大限度延长过程运行时间
- 晶体转换由空气驱动完成（竞争产品是使用生热电机），因而晶体温度非常稳定
- 1/8" 管保持热稳定性，并提供传感器放置的灵活性
- 提供可选晶体闸
规格
| 无水时的最高烘烤温度 | 130°C |
| 最小水流时的最高工作等温环境温度 | 400° C |
| 晶体交换 | Front-loading, extraction tool required (supplied with unit) |
| 水管和空气管 | S-304, 0.125 in. (0.32 cm) O.D. x 0.016 in. (0.04 cm) Wall Thickness 30 in. Long (76 cm) seamless stainless steel tubing |
零件编号
| Part Number | Description |
| 750-446-G1 | CrystalSix sensor (sensor only, no feedthrough included) |
附件
Accessories
Consumables
Spare Parts
| Name | Description |
| QCM Sensor Feedthroughs | QCM Sensor Feedthroughs |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
| Part Number | Description |
| 007-007 | Retainer spring (for crystal holder) |
| 007-023 | Ceramic Retainer |
| 070-0170 | #2 Lockwasher (part of heat shield assembly) |
| 070-0398 | Retaining ring (secures bearing located next to pawl and actuator stem) |
| 070-0777 | Compression spring (on carousel shaft) |
| 070-0778 | Ball bearing (underneath carousel) |
| 070-0779 | Ball bearing |
| 070-0870 | Teflon washer (on carousel shaft) |
| 070-0877 | Shim spacer (part of heat shield assembly) |
| 070-0879 | Bearing (at center of top plate weld assembly) |
| 073-114 | Wire .022 in. x 1.06 in (clamps heat shield retaining pin) |
| 082-026 | # 2-56 Nut (part of heat shield assembly) |
| 750-048-P1 | Retainer spring for 007-048 and 751-619-G1 sputtering head bodies |
| 750-175-P1 | Insulator (underneath leaf spring) |
| 750-188-P3 | Leaf Spring |
| 750-249-P2 | Retaining pin (part of heat shield assembly) |
| 750-250-G1 | Deposition Shield, CrystalSix Sensor |
| 750-256-P2 | Extension spring |
| 750-257-P3 | Corrugated spring 4.40 in. (11.2 cm) |
| 750-261-G1 | Carousel assembly (includes resistor network and electrical contacts) |
| 750-262-G1 | Crystal holder |
| 750-265-G1 | Top plate weld assembly |
| 750-276-P2 | Actuator cover |
| 750-278-P2 | Water line |
| 750-286-P2 | Pneumatic actuator |
| 750-290-P3 | Carousel electrical contacts (set of eight) |
| 750-901-G1 | Crystal 6 Kit |
| 750-293-P2 | Ratchet |
| 750-294-P2 | Stop ratchet |
| 750-295-G1 | Pawl and actuator |
| 750-336-G1 | Resistor network assembly |
| 750-338-P1 | Contact insulator (underneath carousel electrical contacts) |
| In-vacuum cables | |
| 321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
| 007-252 | In-vacuum cable, 30.5 cm (12 in.) |
| 321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
| 007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
| 007-059 | In-vacuum cable, 91.4 cm (36 in.) |
| 007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
| 321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
| 321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
| 321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
| 321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
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