传感器和馈入件
QCM 传感器馈入件
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 提供各种石英晶体监测仪 (QCM) 传感器馈入件，以适应多种 QCM 传感器和腔室配置。CF40 (2.75 in. ConFlat®) 和 2.54 cm (1 in.) 螺栓式馈入件提供电气连接、水冷却和空气管的各种组合。INFICON 馈入件还配备了 Ultra-Torr O 形密封圈压缩接头，用于轻松安装和传感器长度调整。根据要求可提供其他馈入件款式（KF40 等），因此请联系 INFICON 提出您的馈入件需求。
除非另行说明，否则典型的馈入件电气连接包含一个同轴 BNC 连接器（大气端）和一个 Microdot® 连接器（真空端）。此款式的电气连接旨在与真空电缆传感器（例如 INFICON 前装式单传感器、前装式双传感器、溅射传感器、CrystalSix 和 Crystal 12 传感器配合使用。
备注：水和空气馈入管的外径为 4.8 mm (3/16 in.)。
Sensor Type
下表是根据传感器类型提供的馈入要求和部件号快速参考。
| Requirements | Part Number | |||||
| Sensor Type | Number of Coax | Number of Tubes | CF40 | CF40 with Ultra-Torr | 2.54 cm (1 in.) Bolt | 2.54 cm (1 in.) Bolt with Ultra-Torr |
| Single | 1 | 2 | 002-043 | 206-878-G2 | 002-042 | 750-624-G1 |
| Single with Shutter | 1 | 3 | 750-685-G1 | 750-685-G2 | 750-030-G1 | Contact Factory |
| Dual | 2 | 3 | 002-080 | 206-890-G2 | 750-707-G1 | Contact Factory |
| CrystallSix or Crystall 12 | 1 | 3 | 750-685-G1 | 750-685-G1 | 750-030-G1 | Contact Factory |
CrystallSix or with shutter | 1 | 4 | 750-683-G1 | N/A | Contact Factory | N/A |
功能
- 提供 2.54 厘米（1 英寸）螺栓或 CF40（2.75 英寸 ConFlat®）款式
- 可用的 Ultra-Torr O 形密封圈压缩接头
- 提供自定义馈入件配置
- 根据要求可提供其他馈入件款式
零件编号
| Part Number | Description |
| 2.54 cm (1 in.) Bolt Feedthroughs | (Includes VITON® O-ring) |
| 002-042 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes |
| 750-030-G1 | 1 in. Bolt Feedthrough, 1 Coax, 3 Tubes |
| 750-707-G1 | 1 in. Bolt Feedthrough, 2 Coax, 3 Tubes |
| 750-624-G1 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes |
| 783-501-013 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings |
| CF40 (2.75 in. ConFlat) Feedthroughs | (Includes copper gasket) |
| 002-043 | CF40 Feedthrough, 1 Coax, 2 Tubes |
| 750-685-G1 | CF40 Feedthrough, 1 Coax,3 Tubes |
| 002-080 | CF40 Feedthrough, 2 Coax, 3 Tubes |
| 750-683-G1 | CF40 Feedthrough, 1 Coax, 4 Tubes |
| 206-878-G2 | CF40 Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings |
| 750-685-G2 | CF40 Feedthrough, 1 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings |
| 206-890-G2 | CF40 Feedthrough, 2 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings |
| KF40 Feedthroughs | (Does not include centering ring or clamp) |
| 130246 | KF40 Feedthrough, 1 Coax, 2 Tubes |
| 130239 | KF40 Feedthrough, 1 Coax, 3 Tubes |
附件
Accessories
Spare Parts
| Name | Description |
| Clamping Ring with Wing Nut | Clamping Ring with Wing Nut |
| Part Number | Description |
| 002-064 | Quad Ring Gasket, VITON®, CF40 |
| 012-328 | Gasket, Copper, CF40 |
| 070-0237 | O-ring, VITON®, 2.54 cm (1 in.) bolt |
| 211-003 | Clamping ring DN 32-40 ISO-KF |
| 211-070 | Centering ring DN 40 ISO-KF,SS/FPM |
