传感器和馈入件
RSH-600 旋转式传感器
在要求苛刻的应用中表现卓越的晶体性能
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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RSH-600 旋转式传感器头设计用于要求苛刻的工艺,采用非常厚的薄膜和几种不同的材料。RSH-600 将六颗晶体固定在热屏蔽、水冷却的壳体中,确保在温度高达 300°C 的应用环境下获得卓越的晶体性能。晶体固定在一个易于拆卸的 Teflon® 和不锈钢晶体支架中。
功能
- 六颗晶体
- 位置反馈(视控制器而定)
- 可调长度(带可选法兰)
- 坚固耐用的设计
规格
晶体数量 | 6 |
安装孔 | 50.8 mm (2.0 in.) diameter |
工作温度(水冷) | 300° C max with stainless steel head cover 400° C max with copper head cover |
附件
Accessories
Consumables
Spare Parts
Part Number | Description |
153202 | Adjustable flange |
153204 | Crystal Retainer Assembly, Flat |
153204-2 | Crystal Retainer Assembly, Angled |
153731 | RSH-600 Sensor Head Cover, Copper, Flat |
153731-2 | RSH-600 Sensor Head Cover, Copper, Angled |
153708 | RSH-600 Sensor Head Cover, Stainless Steel, Flat |
153713 | RSH-600 Sensor Head Cover, Stainless Steel, Angled |
Name | Description |
Quartz Monitor Crystals | Quartz Monitor Crystals |
Part Number | Description |
153706 | Spring Retainer assembly Flat |
153707 | 24 VDC Solenoid valve assembly |
153709 | Retaining Screw for Flat crystal retainer |
153710 | Crystal Holder Flat (includes 153709) |
153714 | Spring Retainer Assembly, Angled,RSH-600 |
153715 | Retainer Screw for angled crystal retainer |
153716 | Crystal Holder, Angled, RSH-600 |
153722 | Signal/Ground Contact Module, RSH-600 |
153724 | Spring retainer contact kit - Flat (set of six) |
153726 | Crystal Contact for Crystal Retainer Assembly |
889128 | 7 pin male connector |
889128-2 | 7-pin Female Connector |
144-101 | M3x6 SOC Head Screw for Flat Crystal Retainer |
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