传感器和馈入件

RSH-600 旋转式传感器

在要求苛刻的应用中表现卓越的晶体性能

RSH-600-Rotary-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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RSH-600 旋转式传感器头设计用于要求苛刻的工艺,采用非常厚的薄膜和几种不同的材料。RSH-600 将六颗晶体固定在热屏蔽、水冷却的壳体中,确保在温度高达 300°C 的应用环境下获得卓越的晶体性能。晶体固定在一个易于拆卸的 Teflon® 和不锈钢晶体支架中。

功能

  • 六颗晶体
  • 位置反馈(视控制器而定)
  • 可调长度(带可选法兰)
  • 坚固耐用的设计

规格

晶体数量6
安装孔50.8 mm (2.0 in.) diameter
工作温度(水冷)300° C max with stainless steel head cover
400° C max with copper head cover
在此下载完整的规格

附件

Accessories
Consumables
Spare Parts
Part NumberDescription
153202Adjustable flange
153204Crystal Retainer Assembly, Flat
153204-2Crystal Retainer Assembly, Angled
153731RSH-600 Sensor Head Cover, Copper, Flat
153731-2RSH-600 Sensor Head Cover, Copper, Angled
153708RSH-600 Sensor Head Cover, Stainless Steel, Flat
153713RSH-600 Sensor Head Cover, Stainless Steel, Angled
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
Part NumberDescription
153706Spring Retainer assembly Flat
15370724 VDC Solenoid valve assembly
153709Retaining Screw for Flat crystal retainer
153710Crystal Holder Flat (includes 153709)
153714Spring Retainer Assembly, Angled,RSH-600
153715Retainer Screw for angled crystal retainer
153716Crystal Holder, Angled, RSH-600
153722Signal/Ground Contact Module, RSH-600
153724Spring retainer contact kit - Flat (set of six)
153726Crystal Contact for Crystal Retainer Assembly
8891287 pin male connector
889128-27-pin Female Connector
144-101M3x6 SOC Head Screw for Flat Crystal Retainer
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