传感器和馈入件
溅射传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 溅射传感器专为各种溅射过程而设计。镀金铍铜传感器体和冷却管在溅射环境中可实现最佳冷却效果。传感器头内置的磁铁可抑制因外部磁场偏转溅射系统中的高能自由电子而引起的过热。后装式晶体支架设计便于更换晶体，更换时无需从系统中拆卸传感器头。
功能
- 镀金铍铜传感器体和冷却管可实现最佳冷却效果
- 磁铁可偏转自由电子，使其远离监控器晶体
- 利用可弯曲的水管轻松安装，灵活放置传感器
- 后装式晶体插入便于更换晶体
零件编号
| Part Number | Description |
| 750-618-G1 | Sputtering Sensor (sensor only, feedthrough not included) |
Accessories
Consumables
Spare Parts
| Name | Description |
| QCM Sensor Feedthroughs | QCM Sensor Feedthroughs
|
| Sputtering Sensor | |
| Part Number | Description |
| 750-420-G1 | Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors) |
| Name | Description |
|---|---|
| Quartz Monitor Crystals | Quartz Monitor Crystals |
| Sputtering Sensor | |
| Part Number | Description |
| 007-023 | Ceramic Retainer |
| 007-049 | Crystal Holder, Sputtering Sensor |
| 007-007 | Retainer spring (for crystal holder) |
| 007-047 | Sputtering head cover with water lines |
| 007-009 | Magnet for sputtering head cover |
| 070-0440 | Retaining ring (installs onto shaft of shutter assembly) |
| 070-0442 | Retaining ring (installs onto shaft of shutter assembly) |
| 070-0441 | Spacer (installs onto shaft of shutter assembly) |
| 082-044 | Teflon screw (for leaf spring) |
| 082-029-P1 | 2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body |
| 750-009-P2 | Pivot cover (installs onto shaft of shutter assembly) |
| 750-046-G2 | Shutter assembly for pneumatic shutter assembly |
| 750-048-P1 | Retainer spring for 007-048 and 751-619-G1 sputtering head bodies |
| 750-115-P4 | Coupling (installs onto bellows assembly) |
| 750-169-P4 | Bellows assembly for pneumatic shutter assembly |
| 750-174-P2 | Female coax |
| 750-175-P1 | Insulator (underneath leaf spring) |
| 008-007 | CRYSTAL SNATCHER |
| 750-188-P3 | Leaf Spring |
| 750-619-G1 | Sputtering head body with coax connector |
| 750-626-P1 | Spring for sputtering head cover
|
| In-vacuum cables | |
| 321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
| 007-252 | In-vacuum cable, 30.5 cm (12 in.) |
| 321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
| 007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
| 007-059 | In-vacuum cable, 91.4 cm (36 in.) |
| 007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
| 321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
| 321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
| 321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
| 321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
