传感器和馈入件
UHV 可烘烤传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性，提供超越当前市场上的任何传感器头的最佳热稳定性。可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成，设计为可承受连续烘烤温度高达 450° C（仅适用于烘烤，实际沉积监控需要水流）。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。
功能
- 高温铜焊和焊接结构
- 烘烤温度高达 450℃
- 晶体闸（选件）
- 前装式晶体支架
- 易于安装
- CF40 馈入装置
- 馈入件不需要铜焊或焊接
- 焊接为客户指定长度的传感器/馈入装置组合
规格
Bakeable Sensor w/ Shutter
Bakeable Sensor w/out Shutter
| 最高温度 | 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) |
| 晶体交换 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. |
| 水、空气和同轴管线 | 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax |
| 最高温度 | 450°C continuous (for bake only; water flow recommended for actual deposition monitoring) |
| 晶体交换 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. |
| 水、空气和同轴管线 | 0.125 in. (3 mm) O.D. water x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax |
附件
Accessories
Consumables
| Part Number | Description |
| 750-420-G1 | Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors) |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
| Part Number | Description |
| 007-007 | Retainer spring (for crystal holder) |
| 007-064 | Ceramic retainer |
| 007-094 | Clamping spring |
| 007-095 | Handle |
| 007-098 | Female Connector (includes ferrules and nut) |
| 007-099 | Bakeable head contact |
| 007-100 | Insulator for BNC |
| 007-103 | Insulator for bakeable head contact |
| 007-104 | BNC Body |
| 007-147 | #4-40 X 3/8 screw |
| 007-155 | Braze assy - 12 in. (30.5 cm) |
| 007-156 | Braze assy - 20 in (50.8 cm) |
| 007-157 | Braze assy - 30 in. (76.2 cm) |
| 007-228 | #4-40 X 5/8 screw |
| 007-267-P2 | Spreader bar |
| 007-268-P1 | Shoulder washer |
| 007-269-P1 | Shoulder washer |
| 008-007 | CRYSTAL SNATCHER |
| 059-0084 | VCR gasket |
| 070-201 | #4 Split lockwasher |
| 084-069-P1 | #4-40 x 3/16 screw |
| 750-018-P3 | Split clamp |
| 750-018-P5 | Split clamp |
| 750-022-G5 | Bellows assembly - 12 in. (30.5 cm) |
| 750-022-G6 | Bellows assembly - 20 in. (50.8 cm) |
| 750-022-G7 | Bellows assembly - 30 in. (76.2 cm) |
| 750-028-G5 | Braze assy with air line - 12 in. (30.5 cm) |
| 750-028-G6 | Braze assy with air line - 20 in. (50.8 cm) |
| 750-028-G7 | Braze assy with air line - 30 in. (76.2 cm) |
| 750-115-P4 | Coupling (installs onto bellows assembly) |
| 750-118-P4 | Actuator support |
| 750-120-G3 | Shaft assembly |
| 750-216-G1 | Shutter assembly (part of shutter module) |
| 750-218-G1 | Cyrstal holder |
