皮拉尼真空计

PSG50x & PSG51x

大气压至中真空真空计

Pirani-PSG5XX
嵌入式选项

与我们一起彻底改变您的真空计使用体验!

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
Your configuration has been successfully sent!

INFICON Pirani 标准真空计 PSG500、PSG502-S、PSG510-S 和 PSG512-S 采用当今市场上最先进的数字 Pirani 技术,不锈钢传感器单元坚固耐用,结构设计紧凑,适用于半导体系统和标准应用,例如前级真空管。

优势

  • 轻松一键调节 ATM 和 HV
  • 节省空间的坚固设计
  • 铝质壳体
  • 可安装在任何方向
  • 不锈钢测量单元,带金属密封馈入装置
  • 对数信号输出,易于集成
  • 螺纹接头,具有 10 bar 绝对过压能力
  • 250°C 可烘烤装置
  • 镍丝选件,适用于腐蚀性应用
  • 陶瓷馈入装置,适用于腐蚀性极强的应用(PSG510 和 PSG512)
  • 可选设定点
  • 符合 RoHS 标准

典型应用

  • 高真空电离真空计控制
  • 前级真空压力监控
  • 真空系统中的安全电路
  • 高真空和低真空范围内的一般真空测量和控制

规格

PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
Measurement rangeV+1.9 … +10.0
Accuracy(N2)  
1 x 10-3 … 100 mbar% of reading±15%
5 x 10-4 … 1 x 10-3 mbar% of reading±50%
100 … 1000 mbar% of reading±50%
Repeatability (air)  
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature  
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage  
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint  
Number of setpointsNumber of setpointsnone
Setting rangembar
Hysteresis% of reading
Relay contact 
Relay contact: Switching timems
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Measurement rangeV+1.9 … +10.0
Accuracy(N2)  
1 x 10-3 … 100 mbar% of reading 
5 x 10-4 … 1 x 10-3 mbar% of reading 
100 … 1000 mbar% of reading 
Repeatability (air)  
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature  
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage  
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint  
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact 30
Relay contact: Switching timems<20
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Measurement rangeV+1.9 … +10.0
Accuracy(N2)  
1 x 10-3 … 100 mbar% of reading 
5 x 10-4 … 1 x 10-3 mbar% of reading 
100 … 1000 mbar% of reading 
Repeatability (air)  
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature  
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage  
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint  
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact 30
Relay contact: Switching timems<20
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Measurement rangeV+1.9 … +10.0
Accuracy(N2)  
1 x 10-3 … 100 mbar% of reading 
5 x 10-4 … 1 x 10-3 mbar% of reading 
100 … 1000 mbar% of reading 
Repeatability (air)  
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature  
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage  
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint  
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact 30
Relay contact: Switching timems<20
Materials exposed to vacuum AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
Measurement rangeV+1.9 … +10.0
Accuracy(N2)  
1 x 10-3 … 100 mbar% of reading 
5 x 10-4 … 1 x 10-3 mbar% of reading 
100 … 1000 mbar% of reading 
Repeatability (air)  
1 x 10-3 … 100 mbar% of reading2%
Admissible temperature  
Operation°C+5 … +60
Vacuum connection (1)°C80 / 250 (2)
Storage°C-20 … +65
Supply voltage  
At gaugeV (dc)+14 …+30
RippleV (p-p)≤1
Power consumptionW≤1
Setpoint  
Number of setpointsNumber of setpoints2
Setting rangembar2 x 10-3 … 500
Hysteresis% of reading10% above lower threshold
Relay contact 30
Relay contact: Switching timems<20
Materials exposed to vacuum AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
在此下载完整的规格
Part Number
Accessories
Spare Parts
PSG500 tungsten 
350-060PSG500 DN 16 ISO-KF.
350-061PSG500 1/8" NPT
350-062PSG500 DN 16 CF-R
350-063PSG500 1/2" Tube
350-064PSG500 8-VCR (1/2")
350-065PSG500 4-VCR (1/4")
350-066PSG500 7/16-20 UNF
350-067PSG500 DN 16 ISO-KF, ext. body
350-068PSG500 DN 16 CF-R, ext. body
  
PSG500-S tungsten, setpoints 
350-080PSG500-S DN 16 ISO-KF
350-081PSG500-S 1/8" NPT
350-082PSG500-S DN 16 CF-R
350-083PSG500-S 1/2" Tube
350-084PSG500-S 8-VCR (1/2")
350-085PSG500-S 4-VCR (1/4")
350-086PSG500-S 7/16-20 UNF
350-087PSG500-S DN 16 ISO-KF, ext. body
350-088PSG500-S DN 16 CF-R, ext. body
  
PSG502-S nickel, setpoints 
350-140PSG502-S DN 16 ISO-KF
350-141PSG502-S 1/8" NPT
350-142PSG502-S DN 16 CF-R
350-143PSG502-S 1/2" Tube
350-144PSG502-S 8-VCR (1/2")
350-145PSG502-S 4-VCR (1/4")
350-146PSG502-S 7/16-20 UNF
350-147PSG502-S DN 16 ISO-KF, ext. body
350-148PSG502-S DN 16 CF-R, ext. body
  
PSG510-S tungsten, setpoints, ceramic feedthroughs 
350-200PSG510-S DN 16 ISO-KF
  
PSG512-S nickel, setpoints, ceramic feedthroughs 
350-300PSG512-S DN 16 ISO-KF
PSG500 tungsten 
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
  
PSG500-S tungsten, setpoints 
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
  
PSG502-S nickel, setpoints 
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
  
PSG510-S tungsten, setpoints, ceramic feedthroughs 
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
  
PSG512-S nickel, setpoints, ceramic feedthroughs 
211-001Clamping ring DN 10-16 ISO-KF
350-050Power Supply, PxG5xx,G-Cable FCC,1.8m
PSG500 tungsten 
350-920PSG500 Spare Sensor DN 16 KF
350-921PSG500 Spare Sensor 1/8" NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2" Tube
350-924PSG500 Spare Sensor 8-VCR (1/2")
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4")
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
  
PSG500-S tungsten, setpoints 
350-920PSG500 Spare Sensor DN 16 KF
350-921PSG500 Spare Sensor 1/8" NPT
350-922PSG500 Spare Sensor DN 16 CF-R
350-923PSG500 Spare Sensor 1/2" Tube
350-924PSG500 Spare Sensor 8-VCR (1/2")
350-925PSG500 Spare Sensor 7/16-20 UNF
350-926PSG500 Spare Sensor 4-VCR (1/4")
350-927PSG500 Spare Sensor DN 16 KF,ext.body
350-928PSG500 Spare Sensor DN 16 CF-R,ext.body
  
PSG502-S nickel, setpoints 
350-900PSG502 Spare Sensor DN 16 KF
350-901PSG502 Spare Sensor 1/8" NPT
350-902PSG502 Spare Sensor DN 16 CF-R
350-903PSG502 Spare Sensor 1/2" Tube
350-904PSG502 Spare Sensor 8-VCR (1/2")
350-905PSG502 Spare Sensor 7/16-20 UNF
350-906PSG502 Spare Sensor 4-VCR (1/4")
350-907PSG502 Spare Sensor DN 16 KF,ext.body
350-908PSG502 Spare Sensor DN 16 CF-R,ext.body
  
PSG510-S tungsten, setpoints, ceramic feedthroughs 
350-930PSG510 Spare Sensor DN 16 KF
  
PSG512-S nickel, setpoints, ceramic feedthroughs 
350-940PSG512 Spare Sensor DN 16 KF

下载

3D文件
350-060 PSG500 DN 16 ISO-KF
zip 195,3 KB 3D文件
350-061 PSG500 1/8" NPT
zip 271,2 KB 3D文件
350-062 PSG500 DN 16 CF-R
zip 284,1 KB 3D文件
350-063 PSG500 1/2" tube
zip 265,9 KB 3D文件
350-064 PSG500 8 VCR®
zip 279,6 KB 3D文件
350-065 PSG500 4 VCR®
zip 278,4 KB 3D文件
350-066 PSG500 7/16-20 UNF
zip 277,9 KB 3D文件
350-067 PSG500 DN 16 ISO-KF long tube
zip 281,0 KB 3D文件
350-068 PSG500 DN 16 CF-R long tube
zip 295,4 KB 3D文件
350-072 PSG500 G1/8"
stp 2,2 MB 3D文件
350-080 PSG500-S DN 16 ISO-KF
zip 319,0 KB 3D文件
350-081 PSG500-S 1/8" NPT
zip 342,8 KB 3D文件
350-082 PSG500-S DN 16 CF-R
zip 355,3 KB 3D文件
350-083 PSG500-S 1/2" tube
zip 337,7 KB 3D文件
350-084 PSG500-S 8 VCR®
zip 351,4 KB 3D文件
350-085 PSG500-S 4 VCR®
zip 350,3 KB 3D文件
350-086 PSG500-S 7/16-20 UNF
zip 349,7 KB 3D文件
350-087 PSG500-S DN 16 ISO-KF long tube
zip 281,0 KB 3D文件
350-088 PSG500-S DN 16 CF-R long tube
zip 367,1 KB 3D文件
350-140 PSG502-S DN 16 ISO-KF
zip 295,4 KB 3D文件
350-141 PSG502-S 1/8" NPT
zip 342,8 KB 3D文件
350-142 PSG502-S DN 16 CF-R
zip 355,3 KB 3D文件
350-143 PSG502-S 1/2" tube
zip 337,7 KB 3D文件
350-144 PSG502-S 8 VCR®
zip 351,4 KB 3D文件
350-145 PSG502-S 4 VCR®
zip 350,3 KB 3D文件
350-146 PSG502-S 7/16-20 UNF
zip 349,7 KB 3D文件
350-147 PSG502-S DN 16 ISO-KF long tube
zip 281,0 KB 3D文件
350-148 PSG502-S DN 16 CF-R long tube
zip 367,1 KB 3D文件
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