Crystal 12® 传感器
自动晶体切换最大限度地延长生产时间
Product configurator
Gemini™ MxG5xx
INFICON Crystal 12 传感器与INFICON IC6 薄膜沉积控制器结合使用时,可自动更换其晶体,而无需中断过程。晶体不稳定或失效时,IC6 会立即向 Crystal 12 传感器旋转传送带发送信号,要求其立即将新晶体旋转到位,从而实现持续沉积速率监控。为进一步最小化停工时间,可以将晶体预先加载到另一个可选旋转传送带上,这样,可以直接轻松快速地更换装有失效晶体的旋转传送带,从而最大限度缩短系统打开的时间。
功能
- 装有 12 颗晶体,可进行可靠的自动转换,从而最大限度延长过程运行时间
- 易于拆卸的旋转传送带允许快速更换所有 12 颗晶体
- 晶体转换由空气驱动完成(竞争产品是使用生热电机),因而晶体温度非常稳定
- 易于拆卸的前沉积罩保护晶体和旋转传送带上不会积存材料,从而最大限度减少拆卸整个传感器以进行维护的必要性
- 可选安装后套件允许用户根据公制硬件大小自行修改
规格
无水时的最高烘烤温度 | 130°C |
最小水流时的最高工作等温环境温度 | 300° C |
尺寸(最大外壳) | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed |
晶体交换 | Front-loading |
Name | Description |
QCM Sensor Feedthroughs | QCM Sensor Feedthroughs |
Name | Description |
Quartz Monitor Crystals | Quartz Monitor Crystals |
Part Number | Description |
750-276-P3 | Actuator cover |
750-644-G1 | Housing |
XL12-000100 | Deposition Shield, Crystal 12 Sensor |
750-286-P2 | Pneumatic actuator |
750-291-P1 | Detent |
750-902-G1 | Crystal 12 Kit |
750-294-P2 | Stop ratchet |
750-293-P2 | Ratchet |
750-256-P2 | Extension spring |
750-252-P2 | Spring post |
750-649-G1 | Electrical connection |
750-295-G1 | Pawl and actuator |
750-258-P2 | Bearing Shaft |
070-0779 | Ball bearing |
XL12-001000 | Carousel Assembly, Crystal 12 Sensor |
750-650-P1 | Aperture plate (without dowel pin) |
070-1253 | Dowel pin |
750-651-P1 | Resistor network support |
750-655-P1 | Resistor network insulator |
750-642-G1 | Resistor Network |
750-661-P1 | Contact terminal (carousel component) |
750-656-P1 | Crystal insulator (carousel component) |
321-038-P6 | Leaf spring (carousel component) |
750-657-P1 | Grounding leaf spring |
750-671-P1 | Torsion spring |
750-626-P1 | Spring for sputtering head cover |
750-647-P1 | Spindle |
070-1268 | Spindle bearing (spindle component) |
070-1254 | E-Ring (spindle component) |
750-660-P1 | Location screw (spindle component) |
007-126 | 0.125 in. x 30 in. (3.175 mm x 762 mm) seamless tubing |
070-201 | #4 Split lockwasher |
084-004 | #4-40 X .187 Hex socket head screw |
070-398 | Retaining ring |
070-0867 | Shaft spacer |
070-170S | #2 Split Lockwasher SS Spare |
070-177 | #4-40 X 3.12 Hex head screw |
080-038S | Screw 0-80 x.375 LG Phil Pan HD SS Spare |
082-032S | Lock Washer #2 Stainless Steel Spare |
082-045 | #2-56 x .187 Phillips screw |
084-054 | #4 Split lock washer |
082-022 | #2 Flat washer |
082-024 | #2-56 x .250 Hex socket screw |
750-292-P2 | Detent spacer |
080-013 | #0-80 Split washer |
080-007-P1 | #0-80 x .170 Flat washer |
080-009-P1 | #0-80 X .188 Socket head screw |
084-048 | #4-40 x .250 Flat head screw |
750-665-P1 | #2-56 Torsion spring shoulder screw |
084-093S | Screw Socket HD 4-40 x 1.125 in Spare |
086-084-P2S | Screw Socket HD Set 6-32 x 0.125in Spare |
086-041 | #6 Flat washer |
086-038 | #6 Split lock washer |
086-036 | #6-32 x 3/8 socket head screw
|
In-vacuum cables | |
321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
007-252 | In-vacuum cable, 30.5 cm (12 in.) |
321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
007-059 | In-vacuum cable, 91.4 cm (36 in.) |
007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |