传感器和馈入件
薄型双传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
经济型双传感器为一个晶体可能不够的 QCM 应用提供简单并且廉价的解决方案。闸门将覆盖第二个晶体,直到需要该晶体完成过程。经济型双传感器使用两条真空电缆以便于在现场更换。
经济型双传感器的紧凑设计仅需要 32.5 毫米(1.3 英寸)的间隙,传感器和快门组件即可穿过标准 CF40 管嘴。
经济型双传感器还可采用标准和直角方向,它们可进行适当配置以包含带有或不带标准管接头的馈入件。
备注:经济型双传感器使用 4.8 毫米(3/16 英寸)外径水冷管。 它们与配备馈入件的 Ultra-Torr 不兼容,需要管接头才能焊接到具有 4.8 毫米(3/16 英寸)外径水冷管的标准馈入件。
功能
- 双晶体
- 物有所值
- 薄型设计
- 包括晶体闸
- 易于安装
- 在焊接到 CF40 馈入件的可烘烤配置中可用
- Sensor / Feedthrough combinations available with or without bored-through tube fittings
规格
无水时的最高烘烤温度 | 130° C |
最小水流时的最高工作等温环境温度 | 400° C |
Crystal Exchange | Front loading; shutter moves to the side for easy access to the holders |
Feedthrough | 2 pass water and 1 pass air 4.76 mm (0.188 in) OD with 2 microdot coaxial connections |
Water Tubes | S-304, 4.76 mm (0.188 in) OD x 0.51 mm (0.020 in.) wall thickness seamless stainless steel tubing |
Feedthrough Specifications-CF40 (2-3/4 in. ConFlat) | |
材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel |
温度 | Operational environment to 450° C with water cooling or 165° C without |
安装 | Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. |
Accessories
Consumables
Name | Description |
Easy Rate Sensor Feedthroughs | Easy Rate Sensor Feedthroughs |
Name | Description |
Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
Part Number | Description |
784-205-G1 | Crystal Retainer Assembly |
784-403-P1 | Crystal Finger Spring |
784-204-G1 | Crystal Holder Assembly |
784-404-P1 | Retaining Ring |
784-300-P1 | Crystal Holder |
784-405-P1 | Holder Finger Spring |
750-174-P2 | Female coax |
080-011-P3 | SCREW 0-80 x .125 LG SLOT PAN HD SS GP |
080-013 | #0-80 Split washer |
784-206-G1 | Easy Rate Sensor Actuator Assembly |
784-203-G1 | Easy Rate Right Angle Dual Sensor Head |
784-306-P1 | Easy Rate Sensor Actuator Clamp |
084-054S | Split Washer #4 Stainless Steel Spare |
084-027 | Socket Screw |
784-307-P1 | Easy Rate Dual Sensor Shutter |
783-500-023 | In-vacuum cable, 25.4 cm (10 in.) |
783-500-024 | In-vacuum cable, 76.2 cm (30 in.) |
下载
数据表
784-275-G1 - Easy Rate CF40 Feedthrough, 2 Elec., 3 Tubes
stp
•
339,4 KB
•
3D文件
Easy Rate Dual Sensor Datasheet (English)
pdf
•
707,2 KB
•
英文
•
数据表
ERD Configurator
png
•
101,8 KB
•
英文
•
销售支持
Instruction Sheet: Easy Rate Sensor
pdf
•
1,1 MB
•
英文
What is a QCM Sensor?
pdf
•
531,6 KB
•
英文