传感器和馈入件

薄型双传感器

Easy-Rate-Dual-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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经济型双传感器为一个晶体可能不够的 QCM 应用提供简单并且廉价的解决方案。闸门将覆盖第二个晶体,直到需要该晶体完成过程。经济型双传感器使用两条真空电缆以便于在现场更换。

经济型双传感器的紧凑设计仅需要 32.5 毫米(1.3 英寸)的间隙,传感器和快门组件即可穿过标准 CF40 管嘴。

经济型双传感器还可采用标准和直角方向,它们可进行适当配置以包含带有或不带标准管接头的馈入件。

备注:经济型双传感器使用 4.8 毫米(3/16 英寸)外径水冷管。  它们与配备馈入件的 Ultra-Torr 不兼容,需要管接头才能焊接到具有 4.8 毫米(3/16 英寸)外径水冷管的标准馈入件。

功能

  • 双晶体
  • 物有所值
  • 薄型设计
  • 包括晶体闸
  • 易于安装
  • 在焊接到 CF40 馈入件的可烘烤配置中可用
  • Sensor / Feedthrough combinations available with or without bored-through tube fittings

规格

无水时的最高烘烤温度130° C
最小水流时的最高工作等温环境温度400° C
Crystal ExchangeFront loading; shutter moves to the side for easy access to the holders
Feedthrough2 pass water and 1 pass air 4.76 mm (0.188 in) OD with 2 microdot coaxial connections
Water TubesS-304, 4.76 mm (0.188 in) OD x 0.51 mm (0.020 in.) wall thickness seamless stainless steel tubing
Feedthrough Specifications-CF40 (2-3/4 in. ConFlat)
材料304 stainless steel, Teflon, ceramic, beryllium nickel
温度Operational environment to 450° C with water cooling or 165° C without
安装Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.
在此下载完整的规格
Accessories
Consumables
NameDescription
Easy Rate Sensor FeedthroughsEasy Rate Sensor Feedthroughs
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
784-205-G1Crystal Retainer Assembly
784-403-P1Crystal Finger Spring
784-204-G1Crystal Holder Assembly
784-404-P1Retaining Ring
784-300-P1Crystal Holder
784-405-P1Holder Finger Spring
750-174-P2Female coax
080-011-P3SCREW 0-80 x .125 LG SLOT PAN HD SS GP
080-013#0-80 Split washer
784-206-G1Easy Rate Sensor Actuator Assembly
784-203-G1Easy Rate Right Angle Dual Sensor Head
784-306-P1Easy Rate Sensor Actuator Clamp
084-054SSplit Washer #4 Stainless Steel Spare
084-027Socket Screw
784-307-P1Easy Rate Dual Sensor Shutter
783-500-023In-vacuum cable, 25.4 cm (10 in.)
783-500-024In-vacuum cable, 76.2 cm (30 in.)
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