传感器和馈入件
前装式单传感器
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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INFICON 前装式单晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。 经机械装配而成,而不是焊接在一起,因此,您能够在现场方便地更换其部件(如有必要)。传感器可单独订购,或以传感器/馈入件组合的形式订购,该组合可焊接在一起,或通过压缩接头装配在一起。
功能
- 前装式晶体支架
- 易于安装
- 随附 2.54 cm (1 in.) 螺栓馈入装置 / CF40 馈入装置
- 在配有压缩接头时可调长度
- 焊接为客户指定长度的传感器/馈入装置组合
- 在配有压缩接头或焊接到馈入件时无需铜焊
零件编号
射频传感技术
Maximum operating isothermal environment temperature with minimum water flow | 400° C |
Water tube | 1/8 in. (3.175 mm) O.D. seamless stainless steel |
Crystal exchange | Front loading; self-contained package for ease of exchange |
Feedthrough Specifications 1 in. bolt and Ultra-Torr (compression fitting) terminations: | |
Materials | 304 stainless steel, Teflon®, ceramic, beryllium nickel, VITON® |
Temperature | Operational environment to 300° C with water cooling or 165° C without |
Mounting | 1.015 in. ±0.010 in. diameter aperture |
附件
Accessories
Consumables
Name | Description |
QCM Sensor Feedthroughs | QCM Sensor Feedthroughs |
Name | Description |
Quartz Monitor Crystals | Quartz Monitor Crystals |
Spare Parts
Part Number | Description |
007-007 | Retainer spring (for crystal holder) |
007-023 | Ceramic Retainer |
080-018 | Set screw (for female coax) |
750-903-G1 | Standard Sensor Kit - Includes standard set screw, ceramic insulator, Teflon screw |
750-904-G1 | Compact Sensor Kit - Includes compact set screw, ceramic insulator, Teflon screw |
008-007 | CRYSTAL SNATCHER |
750-115-P4 | Coupling (installs onto bellows assembly) |
750-169-P2 | Bellows assembly (coupling not included) |
750-171-P1 | Finger spring contact |
750-172-G1 | Crystal holder (includes retainer spring) |
750-174-P2 | Female coax |
750-188-P3 | Leaf Spring |
750-210-G1 | Shutter module (bellows assembly, shaft assembly, and shutter assembly) |
750-215-G1 | Shaft assembly (part of shutter module) |
750-216-G1 | Shutter assembly (part of shutter module) |
In-vacuum cables | |
321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
783-500-023 | In-vacuum cable, 25.4 cm (10 in.) |
007-252 | In-vacuum cable, 30.5 cm (12 in.) |
321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
783-500-024 | In-vacuum cable, 76.2 cm (30 in.) |
007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
007-059 | In-vacuum cable, 91.4 cm (36 in.) |
007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
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