传感器和馈入件

前装式单传感器

Front-Load-Single-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON 前装式单晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。  经机械装配而成,而不是焊接在一起,因此,您能够在现场方便地更换其部件(如有必要)。传感器可单独订购,或以传感器/馈入件组合的形式订购,该组合可焊接在一起,或通过压缩接头装配在一起。

功能

  • 前装式晶体支架
  • 易于安装
  • 随附 2.54 cm (1 in.) 螺栓馈入装置 / CF40 馈入装置
  • 在配有压缩接头时可调长度
  • 焊接为客户指定长度的传感器/馈入装置组合
  • 在配有压缩接头或焊接到馈入件时无需铜焊

射频传感技术

Maximum operating isothermal environment temperature with minimum water flow400° C
Water tube1/8 in. (3.175 mm) O.D. seamless stainless steel
Crystal exchangeFront loading; self-contained package for ease of exchange
Feedthrough Specifications 1 in. bolt and Ultra-Torr (compression fitting) terminations:
Materials304 stainless steel, Teflon®, ceramic, beryllium nickel, VITON®
TemperatureOperational environment to 300° C with water cooling or 165° C without
Mounting1.015 in. ±0.010 in. diameter aperture
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附件

Accessories
Consumables
NameDescription
QCM Sensor FeedthroughsQCM Sensor Feedthroughs
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals

Spare Parts

Part NumberDescription
007-007Retainer spring (for crystal holder)
007-023Ceramic Retainer
080-018Set screw (for female coax)
750-903-G1Standard Sensor Kit - Includes standard set screw, ceramic insulator, Teflon screw
750-904-G1Compact Sensor Kit - Includes compact set screw, ceramic insulator, Teflon screw
008-007CRYSTAL SNATCHER
750-115-P4Coupling (installs onto bellows assembly)
750-169-P2Bellows assembly (coupling not included)
750-171-P1Finger spring contact
750-172-G1Crystal holder (includes retainer spring)
750-174-P2Female coax
750-188-P3Leaf Spring
750-210-G1Shutter module (bellows assembly, shaft assembly, and shutter assembly)
750-215-G1Shaft assembly (part of shutter module)
750-216-G1Shutter assembly (part of shutter module)
In-vacuum cables 
321-039-G12In-vacuum cable, 15.2 cm (6 in.)
783-500-023In-vacuum cable, 25.4 cm (10 in.)
007-252In-vacuum cable, 30.5 cm (12 in.)
321-039-G11In-vacuum cable, 61.0 cm (24 in.)
783-500-024In-vacuum cable, 76.2 cm (30 in.)
007-044In-vacuum cable, 78.1 cm (30.75 in.)
007-059In-vacuum cable, 91.4 cm (36 in.)
007-061In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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