IC6
让卓越成为可重复的事

IC6 薄膜沉积控制器将 INFICON 薄膜控制器久经考验的性能与独特的功能结合在一起,提供了非凡的价值,所有这些都是为您实现沉积过程的最大化而设计的。
IC6 采用我们的 ModeLock 频率测量系统,提供稳定、高分辨率的速率和厚度测量,其速率分辨率为每 1/10 秒 0.00433 Å/s,处于行业领先地位。没有其他石英晶体控制器具有IC6的性能、质量和功能,使您能够实现卓越的可重复性。
功能
- INFICON ModeLock技术确保了最稳定、最高分辨率的速率和厚度测量,即使在非常低的速率下也是如此。
- 在材料沉积过程中自动确定 Z 比率,从而提高厚度的准确性
- 同时对多达六个来源进行编码沉积
- 彩色TFT液晶显示器使你很容易看到你的过程发生了什么
- 100ms以上的+/-0.0035 Hz采样
- USB数据存储用于屏幕截图、配方存储和数据记录
- 强大的I/O,可灵活地集成到简单或复杂的系统中(使用可扩展的输入(28)和输出(24个继电器,14个TTL输出),并使用逻辑功能(100个逻辑语句)。
- 6个DAC输出为标准配置,另外6个可选,用于源控制、速率或厚度监控
- 最多可以容纳50个过程,每个过程200层,过程可以连接在一起,最多可容纳10,000层
- 多个传感器平均,最多可容纳8个传感器
- 4米的XIU选项为大型系统提供了使用长的真空传感器电缆的能力
- 可选的以太网通信
- 可选的IC6配置编辑软件(零件编号781-620-G1)--基于LabVIEW®的Windows®软件,允许离线创建和编辑IC6 配置文件并将IC/5配置文件转换为IC6格式。
- 符合RoHS标准
典型应用
- 高端光学镀膜
规格
测量性能 | |
厚度和速率分辨率/测量 (1) | ±0.00433 Å |
测量频率范围 | 6.0 to 4.5 MHz (固定) |
过程配方和数据管理 | |
材料计划 | 32 |
过程层(每个过程) | 200 |
过程 | 50(过程可以连接在一起)。 |
来源数量 (2) | 最多为6 |
(1) 工具/密度=100/1,基本频率=6MHz (2) IC6有6个标准的DAC输出,另外6个可以作为选项添加。 12个中的任何一个都可以被配置为信号源控制电压或记录器输出,但是可以同时控制的信号源数量为6个。 |
零件编号
名称 | 描述 |
Front Load Single Sensor | Front Load Single Sensor |
Front Load Dual Sensor | Front Load Dual Sensor |
Cool Drawer Single Sensor | Cool Drawer Single Sensor |
Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
Easy Rate Single Sensor | Easy Rate Single Sensor |
Easy Rate Dual Sensor | Easy Rate Dual Sensor |
UHV Bakeable Sensor | UHV Bakeable Sensor |
ALD Sensor | ALD Sensor |
Sputtering Sensor | Sputtering Sensor |
CrystalSix® Sensor | CrystalSix® Sensor |
Crystal 12® Sensor | Crystal 12® Sensor
|
配件和替换零件 | |
零件编号 | 描述 |
779-220-G1 | CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables |
779-220-G2 | CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables |
Oscillator kits | (Includes oscillator and cables) |
781-611-G15 | XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-611-G30 | XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-611-G50 | XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-611-G100 | XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-612-G15 | 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-612-G30 | 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-612-G50 | 4 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-612-G100 | 4m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-613-G15 | 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-613-G30 | 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-613-G50 | 4m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
781-613-G100 | 4m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3 |
Oscillator Only | (No cables included) |
781-600-G1 | XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3 |
781-600-G2 | XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6 |
Cables | |
600-1261-P100 | 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P15 | 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU |
600-1261-P30 | 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P50 | 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
755-257-G6 | 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough |
Configuration Editor Software | |
781-620-G1 | IC6 Configuration Editor Software - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format. |
名称 | 描述 |
---|---|
Quartz Monitor Crystals | Quartz Monitor Crystals |