监测

IMM-100

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IMM-100

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
Request
Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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用精确的速率和厚度监测来保护和增加您的利润

IMM-100是一款采用ModeLock技术的沉积监控器,可以最大限度地提高再现性和均匀性,具有最高的厚度精度、最佳的测量分辨率和最低的速率噪声。

由于内置了振荡器,IMM-100可以很容易地集成到EtherCAT系统中,而且硬件和占地面积最小。这个强大而精确的测量监控器一定会给您的工艺带来新的性能水平。

功能

  • INFICON ModeLock 技术提供最长的晶体寿命,并确保提供最稳定、最高分辨率的速率和厚度测量,即使在极低的速率下也是如此
  • 通过最佳的 QCM 厚度测量,最大限度地提高产量
  • 单通道速率和厚度监测器,没有不必要的附加功能,以尽量降低成本
  • 100毫秒采样的±0.0035赫兹
  • EtherCAT通信实现无缝集成
  • 尺寸紧凑,通过节省工具空间,最大限度地降低集成成本
  • 专家应用支持,能够讨论独特的应用需求,提供比竞争对手更多的支持
  • 符合RoHS标准

典型应用

  • OLED应用

规格

传感器输入1
测量频率范围6.0 to 4.5 MHz (固定)
速率和厚度分辨率0.0042埃(新晶体);0.0076埃(晶体@4.5兆赫),超过100毫秒的样品,材料密度=1.0,Z-比率=1.0
通信类型EtherCAT,2个RJ45插口,支持数据菊花链。通过开关明确的设备ID
零件编号
附件
易耗品
零件编号描述
785-600-G1IMM-100 Thin Film Deposition Monitor
零件编号描述
Optional Power SuppliesThe power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
961-021-G7Power Supply Kit IL 240V
961-021-G8Power Supply Kit IL 4.5 M Extension
961-021-G9Power Supply Kit IL 9.0 M Extension
961-021-G10Power Supply Kit UK 240V
961-021-G11Power Supply Kit UK 4.5 M Extension
961-021-G12Power Supply Kit UK 9.0 M Extension
Optional Mounting Bracket 
785-202-G1Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
Optional Communications Cable 
600-1190-P1ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8Ethernet 7m cable
600-1190-P15Ethernet 15m cable
命名描述
Quartz Monitor CrystalsQuartz Monitor Crystals
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