监测
SQM-160
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
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SQM-160 使用成熟的 INFICON 石英晶体传感器技术在薄膜沉积过程中测量速率和厚度。两个传感器输入为标准输入，另外四个传感器输入为可选输入。两个录像机输出可提供模拟速率和厚度信号。
传感器输入可分配给不同的材料，在大型系统中平均分配以实现精确的沉积控制，或者配置为双传感器。速率采样模式可在高速率过程中屏蔽传感器，从而延长传感器的使用寿命。速率显示为 0.1Å/s 或 0.01Å/s，用户可自行选择。此外，还可以选择频率或质量显示。凭借四个继电器输入，SQM-160 可控制来源或传感器屏蔽、信号时间和厚度设定点以及信号晶体失效。数字输入允许外部信号启动/停止和归零读数。
功能
- 两个标准测量通道，另外四个可选
- 模拟输出便于记录速率/厚度
- 高分辨率选件：0.03 Hz，10 读数/秒
- RS-232 标准接口，可选择连接 USB 或以太网
规格
SQM-160 Standard Resolution
SQM-160 High Resolution
| QCM 传感器输入 | Standard: 2; optional: 4 |
| 测量频率范围 | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| 厚度和速率分辨率/测量 (1) | ± 0.37 Å |
| 存储薄膜 | 99 |
| 数字输入/输出 | Four inputs, four relay outputs |
| (1) 工具/密度 = 100/1，基础频率 = 6 赫兹，0.10 秒测量间隔 | |
| QCM 传感器输入 | Standard: 2; optional: 4 |
| 测量频率范围 | Adjustable: 1.0 MHz minimum 6.5 MHz maximum |
| 厚度和速率分辨率/测量 (1) | ± 0.037 Å |
| 存储薄膜 | 99 |
| 数字输入/输出 | Four inputs, four relay outputs |
| (1) 工具/密度 = 100/1，基础频率 = 6 赫兹，0.10 秒测量间隔 | |
附件
Accessories
Accessories and Replacement Parts
Consumables
| Front Load Single Sensor | Front Load Single Sensor |
| Front Load Dual Sensor | Front Load Dual Sensor |
| Cool Drawer Single Sensor | Cool Drawer Single Sensor |
| Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
| Easy Rate Single Sensor | Easy Rate Single Sensor |
| Easy Rate Dual Sensor | Easy Rate Dual Sensor |
| UHV Bakeable Sensor | UHV Bakeable Sensor |
| Sputtering Sensor | Sputtering Sensor |
| Part Number | Description |
| 782-900-014 | 19 in. Rack Mount Kit for two SQM-160 or CI-100 instruments |
| 782-502-096-G1 | USB option card |
| 782-502-097-G1 | Ethernet option card |
| Oscillator kits | (Includes oscillator and cables) |
| 783-500-109-10 | 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable |
| 783-500-109-25 | 7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable |
| 783-500-109-50 | 15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable |
| 783-500-109-75 | 22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable |
| Oscillator Only | (No cables included) |
| 783-500-013-G1 | OSC-100 oscillator only (no cables) |
| Cables | |
| 782-902-011 | 15.2 cm (6 in.) BNC cable, male/female |
| 782-902-012-10 | 3 m (10 ft.) BNC cable, male/male |
| 782-902-012-25 | 7.6 m (25 ft.) BNC cable, male/male |
| 782-902-012-50 | 15.2 m (50 ft.) BNC cable, male/male |
| 782-902-012-75 | 22.8 m (75 ft.) BNC cable, male/male |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
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