控制器

XTC/3

Advanced, Affordable Rate Control for Single or Multiple Layers

先进的、经济实惠的单层或多层速率控制

现在，您可以在单层和多层工艺的薄膜沉积控制器中获得所需的一切。XTC/3 带有专利 ModeLock，提供跳模预防功能，确保获得始终如一的质量。通过 XTC/3 薄膜沉积控制器，您可以极其准确地控制沉积速度和厚度，能够达到几乎任何层数，安装轻松且可靠性极高，从而确保生产效率。

薄膜沉积控制领域的全球领头羊 INFICON，现在提供了一种拥有成本极低的仪表，为您带来前所未有的价值。

无论您的控制需要属于生产还是研发领域，都能从 INFICON XTC/3 中找到完美的解决方案。

全球 INFICON 支持

无论您身在何处，都能获得快速的疑难解答和周到的服务，确保正常运行时间最大化。INFICON 是唯一一家在全球设有本地服务与技术支持中心的薄膜沉积控制器制造商，其办事处遍布全球。

功能

提供有单层和多层型号
专利 ModeLock 技术可避免跳模引起的薄膜厚度误差
支持 INFICON Crystal 12^®、Crystal Six^® 及双传感器自动晶体转换，从而最大化生产力
XTC/3M 多层型号最多支持 99 个过程、999 层薄膜、32 种薄膜材料、2 个传感器和两种源
XTC/3S 单层型号最多支持 9 种薄膜、2 个传感器和两种源
易于阅读的 TFT LCD 图形显示器
可以为薄膜和过程分配唯一的描述性名称，以便于检索
提供以太网连接
独立式（不需要计算机）或便于 PC 操作的可选 Windows^® 软件
插拔式替换 INFICON XTC/2 控制器（受限于 XTC/2 功能和命令集）

典型应用

高端光学镀膜

规格

XTC3/S

XTC3/M

测量频率范围	6.0 to 5.0 MHz (fixed)

厚度和速率分辨率/测量 (1)	±0.034 Å

传感器输入数量	2

来源输出数量	2

(1) 工具/密度 = 100/1，基础频率 = 6 兆赫兹

测量频率范围	6.0 to 5.0 MHz (fixed)

厚度和速率分辨率/测量 (1)	±0.034 Å

传感器输入数量	2

来源输出数量	2

(1) 工具/密度 = 100/1，基础频率 = 6 兆赫兹

零件编号

XTC3 Part Number

pdf • 1,8 MB

Accessories

Accessories and Replacement Parts

Consumables

Name	Description
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Easy Rate Single Sensor	Easy Rate Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
ALD Sensor	UHV Bakeable Sensor
UHV Bakeable Sensor	Sputtering Sensor
Sputtering Sensor	CrystalSix® Sensor
CrystalSix® Sensor	Crystal 12® Sensor
Crystal 12® Sensor	RSH-600 Rotary Sensor

Part Number	Description
755-262-G1	Handheld Power Controller (for manual power control)
780-702-G1	One unit rack mount kit - Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack
780-702-G2	Two unit rack mount kit - Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack
780-032-G1	Editor Software, XTC/3
779-220-G1	CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2	CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits	(Includes oscillator and cables)
780-611-G15	XIU PKG with 15 ft. (4.6 m) cable - Fore use with XTC/3
780-611-G30	XIU PKG with 30 ft. (9.1 m) cable - For use with XTC/3
780-611-G50	XIU PKG with 50 ft. (15.2 m) cable - For use with XTC/3
780-611-G100	XIU PKG with 100 ft. (30.5 m) cable - For use with XTC/3
780-612-G15	4m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G30	4m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G50	4m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G100	4m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G15	4m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G30	4m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G50	4m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G100	4m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
Oscillator Only	(No cables included)
780-600-G1	XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 6 in. to 72 in. (15 cm to 183 cm)
780-600-G2	XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 118 in. to 157 in. (3 m to 4 m)
Cables
755-257-G6	15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P15	4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30	9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50	15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P100	30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU