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INFICON Quantus® HP100
Description
A Newly Developed Optical Gas Analyzer for Semiconductor Manufacturing
This webinar will present an overview of the newly developed optical gas analyzer, Quantus HP100, based on self-plasma optical emission spectroscopy technology.
As a sister gas analyzer for the market-proven Quantus LP100 under the INFICON optical sensor portfolio, Quantus HP100 provides unparalleled performance to many critical semiconductor applications, such as leak detection, endpoint detection and gas analysis.
It has a much broader operational pressure range - up to 450 Torr without a pumping system - and it boosts the detection limit down to sub-ppm level.
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