Mass Spectrometers
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Mass Spectrometers
Transpector APX Multi-Pressure
Advanced process expert for Multi-Pressure ALD/CVD and Etch.
Transpector APX Multi-Pressure
- xParts coated for extended lifetime in harsh chemistry
- Multi pressure sampling inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Mass Spectrometers
Transpector® APX ALD Single Pressure
Advanced process expert for Single Pressure ALD/CVD and Etch.
Transpector® APX ALD Single Pressure
- xParts coated for extended lifetime in harsh chemistry
- High temperature single pressure inlet
- Detection limit below 10 ppb
- Industry leading pumping speed
Mass Spectrometers
Transpector® CPX
Compact Process Expert for Advanced Process Monitoring
Transpector® CPX
- HexBlock multi-pressure sampling inlet
- Detection limit below 200 ppb
- Industry leading pumping speed
- 30% decrease in system volume
Mass Spectrometers
Transpector® XPR 3+
Extreme PVD Process Monitoring Quadrupole Mass Spectrometer
Transpector® XPR 3+
- Industry leading maximum operating pressure
- Optional overpressure isolation valve interlock
- Scans up to 100 amu
Mass Spectrometers
Transpector® MPH
High performance quadrupole mass spectrometer
Transpector® MPH
- Nine-decade dynamic range
- Industry leading data collection rate
- Interchangeable sensors and electronics
- Scans up to 300 amu
Mass Spectrometers
Transpector® MPS
Multi-Purpose Quadrupole Mass Spectrometer
Transpector® MPS
- Nine-decade dynamic range
- Interchangeable sensors and electronics
- Optional continuous dynode electron multiplier
- Scans up to 200 amu
Mass Spectrometers
Transpector® SPS
Process monitoring at target pressure range
Transpector® SPS
- Targeted high pressure processes
- Single pressure sampling inlet
- Detection limit below 1 ppm
- Integrated differential pumping system
Mass Spectrometers
QMG 700
QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation
QMG 700
- Mass range options from 1-512 amu
- More than nine decades of dynamic range
- Extremely fast measurement speeds: 0.125 ms/amu
- MDPP < 10E-16 mbar