Optical Gas Analyzers
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![1111-Augent-OPG550 1111-Augent-OPG550](/uploads/media/323x215/01/1111-Augent-OPG550.png?v=1-0)
Optical Gas Analyzers
Augent® OPG550
High speed chamber leak test - gas analysis
Augent® OPG550
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
![8165-Quantus-HP100 8165-Quantus-HP100](/uploads/media/323x215/05/8165-Quantus-HP100.png?v=11-0)
Optical Gas Analyzers
Quantus® HP100
Provide real-time leak detection, endpoint detection and process monitoring for cutting-edge semiconductor manufacturing processes and other gas analysis applications
Quantus® HP100
- Operating range from 1 Torr up to 450 Torr
- Superior detection limit < 1 ppm
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
![929-Quantus-LP100 929-Quantus-LP100](/uploads/media/323x215/09/929-Quantus-LP100.png?v=1-0)
Optical Gas Analyzers
Quantus® LP100
Provide real-time leak detection and endpoint detection for critical process environments
Quantus® LP100
- Operating range of 10 mTorr to 1 Torr
- Excellent detection limits down to low ppm levels
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection