Optical Gas Analyzers
INFICON provides industry-leading optical sensor solutions for gas analysis in semiconductor, display, and other manufacturing processes. Our cutting-edge technologies enable in-situ air leak detection, endpoint detection, and process monitoring to improve yields and minimize scraps.
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Dual Gauge for Optical Gas Analysis and Total Pressure Measurement
Augent® OPG550
Provide fast real-time leak detection, gas analysis, and process monitoring for semiconductor manufacturing and other markets.
Augent® OPG550
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
Optical Gas Analyzers
Quantus® HP100
Provide real-time leak detection, endpoint detection and process monitoring for cutting-edge semiconductor manufacturing processes and other gas analysis applications
Quantus® HP100
- Operating range from 1 Torr up to 450 Torr
- Superior detection limit < 1 ppm
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Optical Gas Analyzers
Quantus® LP100
Provide real-time leak detection and endpoint detection for critical process environments
Quantus® LP100
- Operating range of 10 mTorr to 1 Torr
- Excellent detection limits down to low ppm levels
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection