Mass Spectrometers

Transpector® CPM 3

Fast, Field-Ready Process Monitoring System

Performance, Reliability, and Versatility

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.

Transpector CPM 3 provides proven return on investment to our partners through:

Industry Leading Measurement Technology
Robust and Adaptive Architecture
Ease of Maintenance
Superior Product Support

Features

Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
Field-proven durability and reliability in the most demanding CVD and Etch applications
Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
Compact size—allows for easy integration into production semiconductor equipment
Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching

Specifications

100 AMU CPM

200 AMU CPM

300 AMU CPM

Total Pressure Range	5E-7 - 1E-3 Torr

Detection Limit	< 1 ppm

Process Pressure Range	1E-8 Torr - 1.2 atm

Sensitivity (Low Emission)	> 4E-6 Amps/Torr

Sensitivity (High Emission)	> 2E-5 Amps/Torr

Total Pressure Range	5E-7 - 1E-3 Torr

Detection Limit	< 2 ppm

Process Pressure Range	1E-8 Torr - 1.2 atm

Sensitivity (Low Emission)	> 2E-6 Amps/Torr

Sensitivity (High Emission)	> 1E-5 Amps/Torr

Total Pressure Range	5E-7 - 1E-3 Torr

Detection Limit	< 4 ppm

Process Pressure Range	1E-8 Torr - 1.2 atm

Sensitivity (Low Emission)	> 1E-6 Amps/Torr

Sensitivity (High Emission)	> 5E-6 Amps/Torr

Download full specifications

Consumables

100 AMU CPM

200 AMU CPM

300 AMU CPM

Part Number	Description
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit 2 Stage
923-706-G10	30 Torr HexBlock orifice (10.5 micron)
923-706-G3	10 Torr HexBlock orifice (20 micron)
923-706-G4	1 Torr HexBlock orifice (62 micron)
923-706-G6	10 mtorr HexBlock orifice (750 micron)
923-706-G7	360 mtorr HexBlock orifice (120 micron)
923-706-G8	15 mtorr HexBlock orifice (350 micron)
923-706-G9	3 Torr HexBlock orifice (35 micron)
923-707-G1	10 Torr HexBlock sniffer (5 cm length)
923-707-G2	100 Torr HexBlock sniffer (5 cm length)
923-707-G3	7 Torr HexBlock sniffer
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner

Part Number	Description
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit 2 Stage
923-706-G10	30 Torr HexBlock orifice (10.5 micron)
923-706-G3	10 Torr HexBlock orifice (20 micron)
923-706-G4	1 Torr HexBlock orifice (62 micron)
923-706-G6	10 mtorr HexBlock orifice (750 micron)
923-706-G7	360 mtorr HexBlock orifice (120 micron)
923-706-G8	15 mtorr HexBlock orifice (350 micron)
923-706-G9	3 Torr HexBlock orifice (35 micron)
923-707-G1	10 Torr HexBlock sniffer (5 cm length)
923-707-G2	100 Torr HexBlock sniffer (5 cm length)
923-707-G3	7 Torr HexBlock sniffer
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner

300 AMU CPM
Part Number	Description
059-0196	NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400	Replacement c-ring
070-1042	O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1	CPM Replacement Diaphragm Kit 2 Stage
923-706-G10	30 Torr HexBlock orifice (10.5 micron)
923-706-G3	10 Torr HexBlock orifice (20 micron)
923-706-G4	1 Torr HexBlock orifice (62 micron)
923-706-G6	10 mtorr HexBlock orifice (750 micron)
923-706-G7	360 mtorr HexBlock orifice (120 micron)
923-706-G8	15 mtorr HexBlock orifice (350 micron)
923-706-G9	3 Torr HexBlock orifice (35 micron)
923-707-G1	10 Torr HexBlock sniffer (5 cm length)
923-707-G2	100 Torr HexBlock sniffer (5 cm length)
923-707-G3	7 Torr HexBlock sniffer
961-707-G1	Electron Multiplier Kit, Spare
964-710-G1	Filament Kit CPM Tungsten
964-710-G2	Filament Kit CPM Coated
964-711-G1	Ion Source Kit CPM Tungsten
964-711-G2	Ion Source Kit CPM Tungsten w/Liner
964-712-G1	Ion Source Kit CPM Coated
964-712-G2	Ion Source Kit CPM Coated w/Liner

Spare Parts

100 AMU CPM

200 AMU CPM

300 AMU CPM

Part Number	Description
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring
915-724-G1	Package of three spare liners (used only with liner configured ion source)
922-204-G1	Capillary assembly - 1.5 m
922-204-G3	Capillary assembly - 3 m
923-403-P2	CPM Valve Controller Manifold Assembly
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock orifice replacement tools
923-711-G1	HexBlock valve replacement kit
923-712-G1	Spare HexBlock orifice gasket (pack of five)
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable

Part Number	Description
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring
915-724-G1	Package of three spare liners (used only with liner configured ion source)
922-204-G1	Capillary assembly - 1.5 m
922-204-G3	Capillary assembly - 3 m
923-403-P2	CPM Valve Controller Manifold Assembly
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock orifice replacement tools
923-711-G1	HexBlock valve replacement kit
923-712-G1	Spare HexBlock orifice gasket (pack of five)
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable

Part Number	Description
032-0079	Turbo Molecular Pump (w/CF40 flange)
059-0400	Replacement c-ring
915-724-G1	Package of three spare liners (used only with liner configured ion source)
922-204-G1	Capillary assembly - 1.5 m
922-204-G3	Capillary assembly - 3 m
923-403-P2	CPM Valve Controller Manifold Assembly
923-417-G1	Foreline Protection Kit, CPM
923-710-G1	HexBlock orifice replacement tools
923-711-G1	HexBlock valve replacement kit
923-712-G1	Spare HexBlock orifice gasket (pack of five)
923-723-G2	2 Stage Diaphragm Foreline Pump
964-208-G11	CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12	CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13	CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14	CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1	CPM Cable Box Assembly
964-403-P1	CPM Manifold Heater
964-603-G2	CPM Controller Box
964-720-G1	CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2	CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3	CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4	CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable

Downloads

Brochures

Transpector CPM 3 Brochure

pdf • 7,9 MB • English • Brochures

Manuals

Transpector CPM OM

pdf • 12,2 MB • English • Product Presentations, Operating Manual

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