Transpector® CPX
Compact Process Expert for Advanced Process Monitoring
Product configurator
Gemini™ MxG5xx
Enhanced Performance, Proven Reliability, & Application Versatility
INFICON Transpector CPX is a market-leading Residual Gas Analyzer (RGA) for advanced process monitoring in semiconductor manufacturing. INFICON understands that semiconductor manufacturing processes have specific needs that require flexibility to meet application requirements. Transpector CPX is designed with this versatility in mind, with the multi-pressure HexBlock inlet and a variety of feature options to meet application needs.
The next generation Transpector CPX boasts a 30% volume decrease from previous generations* while maintaining industry leading pumping systems. Optionally, the Transpector CPX can have a dual-filament closed ion source to improve lifetime and RGA uptime while operating. Additionally, Transpector CPX is a smarter system with more capable control.
*Compared to Transpector CPM 3
Advantages
- Configurable HexBlock with up to three pressure inlets for versatile applications
- 30% reduction in system volume from the Transpector CPM 3 for easier RGA integration in space-constrained applications
- Optional dual filament feature option for extended lifetime and increased RGA uptime
- Reduced system complexity with an industry leading pumping system and temperature-controlled heating cartridges
- Automated calibration ensures long-term data reliability and accuracy for sensor to sensor and tool to tool chamber matching
- Transpector CPX becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class application experts
Specifications
| Detection Limit | < 200 ppb |
| Process Pressure Range | 1E-8 Torr to 1.2 ATM |
| Sensitivity (Low Emission) | > 4E-6 Amps/Torr |
| Sensitivity (High Emission) | > 2E-5 Amps/Torr |
| Detection Limit | < 500 ppb |
| Process Pressure Range | 1E-8 Torr to 1.2 ATM |
| Sensitivity (Low Emission) | > 4E-6 Amps/Torr |
| Sensitivity (High Emission) | > 2E-5 Amps/Torr |
| Detection Limit | < 1 ppm |
| Process Pressure Range | 1E-8 Torr to 1.2 ATM |
| Sensitivity (Low Emission) | > 4E-6 Amps/Torr |
| Sensitivity (High Emission) | > 2E-5 Amps/Torr |
Consumables
| Part Number | Description |
| 969-818-G2S | Single Filament Coated Filament Kit |
| 969-818-G1S | Single Filament Tungsten Filament Kit |
| 969-819-G3S | Single Filament Coated Ion Source Kit |
| 969-819-G1S | Single Filament Tungsten Ion Source Kit |
| 969-819-G2S | Single Filament Tungsten Ion Source Kit + Anode Liner |
| 961-707-G1 | Electron Multiplier Replacement Kit |
| 923-418-G2 | Replacement Diaphragm Kit for 2-Stage Pump |
| 923-711-G1 | HexBlock Valve Replacement Kit |
