1. Transpector® MPH
Mass Spectrometers

Transpector® MPH

Unparalleled Performance for Increased Yields and Maximum Uptime

Transpector-MPH

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.

INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.

Features

  • Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks
  • TCP/IP Ethernet connectivity
  • Dual filaments
  • Field replaceable Electron Multiplier
  • Combined anode, cathode and repeller filament kit
  • Shorter sensors minimize installed footprint
  • Nine-decade dynamic range
  • MDPP of <2E-15 Torr (100 amu)
  • Increased Signal-to-Noise ratio
  • Interchangeable sensors and electronics
  • Sensors are assembled, tested and double bagged in a cleanroom environment
  • RoHS Compliant

Specifications

MPH100M
MPH100F
MPH200M
MPH200F
MPH300M
MPH300F
Mass Range100 amu
Min. Detectable Partial Pressure 2E-15 Torr
Sensitivity (FC)6E-4 A/Torr
Sensitivity (EM)500 A/Torr
Max. Operating Pressure5E-4 Torr
Mass Range100 amu
Min. Detectable Partial Pressure 3E-13 Torr
Sensitivity (FC)6E-4 A/Torr
Sensitivity (EM)NA
Max. Operating Pressure5E-4 Torr
Mass Range200 amu
Min. Detectable Partial Pressure 3E-15 Torr
Sensitivity (FC)5E-4 A/Torr
Sensitivity (EM)500 A/Torr
Max. Operating Pressure5E-4 Torr
Mass Range200 amu
Min. Detectable Partial Pressure 4E-13 Torr
Sensitivity (FC)5E-4 A/Torr
Sensitivity (EM)NA
Max. Operating Pressure5E-4 Torr
Mass Range300 amu
Min. Detectable Partial Pressure 4E-15 Torr
Sensitivity (FC)4E-4 A/Torr
Sensitivity (EM)250 A/Torr
Max. Operating Pressure5E-4 Torr
Mass Range300 amu
Min. Detectable Partial Pressure 5E-13 Torr
Sensitivity (FC)4E-4 A/Torr
Sensitivity (EM)NA
Max. Operating Pressure5E-4 Torr

Accessories

961-021-G1Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8Ethernet 7m cable
600-1190-P15Ethernet 15m cable
600-1428-P1Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1Power Supply Extension Cable - 30 ft (9m)
961-417-G1Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1Ethernet Switch 8 port
961-702-G1Pirani Interlock Kit
914-024-G1Angle Valve Kit, Manual (includes heater)
914-026-G1MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1MPH Heater Kit 120 VAC
961-029-G2MPH Heater Kit 230 VAC
Universal Spare Parts
Consumables
961-416-P1Spare MPH Heating Jacket
914-407-P1Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1Spare Heater Power Cable 120 VAC
600-1117-P2Spare Heater Power Cable 230 VAC
914-410-P1Spare Angle Valve, Manual
914-220-G1Spare Angle Valve, Air Operated
961-206-G2MPH Extension Kit
961-205-G2MPH HPR Extension Kit
961-022-G1Spare O-Ring and Nut Kit
074-5007-G1Gas Analysis Product Manuals CD
961-700-G1Coated Iridium Filament Kit
961-700-G2Tungsten Filament Kit
961-701-G1Coated Iridium Filament Ion Source
961-701-G2Tungsten Filament Ion Source
961-2428-G2Electron Multiplier Replacement Kit

Spare Parts

MPH100F
MPH100M
MPH200F
MPH200M
MPH300F
MPH300M
961-H1FASMPH Sensor, 100 AMU FC (MPH100F) w/ Y2O3/Ir Filaments
961-H1FBSMPH Sensor, 100 AMU FC (MPH100F) w/ Tungsten Filaments
MP-H10SMPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet
961-H1MASMPH Sensor, 100 AMU EM/FC (MPH100M) w/ Y2O3/Ir Filaments
961-H1MBSMPH Sensor, 100 AMU EM/FC (MPH100M) w/ Tungsten Filaments
MP-H10SMPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet
961-H2FASMPH Sensor, 200 AMU FC (MPH200F) w/ Y2O3/Ir Filaments
961-H2FBSMPH Sensor, 200 AMU FC (MPH200F) w/ Tungsten Filaments
MP-H20SMPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet
961-H2MASMPH Sensor, 200 AMU EM/FC (MPH200M) w/ Y2O3/Ir Filaments
961-H2MBSMPH Sensor, 200 AMU EM/FC (MPH200M) w/ Tungsten Filaments
MP-H20SMPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet
961-H3FASMPH Sensor, 300 AMU FC (MPH300F) w/ Y2O3/Ir Filaments
961-H3FBSMPH Sensor, 300 AMU FC (MPH300F) w/ Tungsten Filaments
MP-H30SMPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet
961-H3MASMPH Sensor, 300 AMU EM/FC (MPH300M) w/ Y2O3/Ir Filaments
961-H3MBSMPH Sensor 300 AMU EM/FC (MPH300M) w/ Tungsten Filaments
MP-H30SMPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet
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