Helium Leak Detector
UL1000 / UL1000 Fab
Mobile Helium Leak Detectors with ULTRATEST™ sensor technology.
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing
The INFICON UL1000 Helium Leak Detector Series is the renowned standard when it comes to economic helium vacuum leak testing in industrial (UL1000 with oil-sealed fore vacuum pumps) or semiconductor environments (UL1000 Fab with dry compressing fore vacuum pumps).
The UL1000 Series provides the best compromise between high performance, unparalleled robustness, and affordability. It delivers state-of-the art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design ensures high maneuverability facilitating easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) allows for continuous leak testing within at least two decades lower than existing background levels.
These features collectively reduce the duration of your leak testing process while ensuring all leaks are detected efficiently and economically.
With the addition of the TC1000 Test Chamber accessory, the UL1000 Helium Leak Detector Series provides easy, fast and accurate testing of hermetically sealed parts like IC packages, quartz crystals and laser diodes (according to MIL-STD 883, Method 1014).
Advantages
- minimize leak testing efforts through quick pump down and response time
- avoid need for multiple leak tests by using selectable background suppression (I·ZERO)
- I·CAL (Intelligent Calculation Algorithm for Leak rates)to ensure fastest response time to leaks in all measurement ranges
- enable easy access to maintenance areas with restricted space through maneuverable design
- low total cost of ownership (TCO) enabled by robust two hot filament ion source (3 years warranty) and counterflow vacuum system
- easy to use with rotatable display, optical and audible leak indication, and optional remote control
- low maintenance via a built-in test leak with auto calibration procedure
- Software updates via email easily possible
- Built-in software menu "Auto Leak Test" function to perform automatic testing of hermetically sealed components (optional TC1000 Test Chamber)
Typical Applications
- industrial vacuum equipment manufacturing with high demand for cleanliness
- vacuum components or sub-assemblies before they are installed in existing tools
- maintenance work on vacuum tools, with or without support from their own pump
- inspections and installations of process gas systems
- semiconductor, flat panel display or solar cell manufacturing
- automotive components
- refrigeration and air conditioning components and sub-assemblies hermetically sealed electronic devices
- heat exchangers
Specifications
UL1000
UL1000 Fab
| Min. detectable leak rate for helium (vacuum method) | mbar•L/s | < 5·10-12 |
| Min. detectable leak rate for helium (sniffer mode) | mbar•L/s | < 5·10-8 |
| Max. Inlet pressure GROSS mode | mbar | 15 |
| Max. Inlet pressure FINE mode | mbar | 2 |
| Max. Inlet pressure ULTRA mode | mbar | 0.4 |
| Fore vacuum pump type | Oil-sealed | |
| Pumping speed during evacuation | m³/h | 16 at 50 Hz |
| Helium pumping speed ULTRA mode | L/s | 2.5 |
| Detectable masses | 2,3,4 amu | |
| Mass spectrometer Sector field | 180° | |
| Filaments ion soure Iridium/Yttria coated | 2 | |
| Calibrated built in test leak | mbar•L/s | E-7 |
| Test port | DN 25 KF | |
| Adjustable triggers | 2 | |
| Interface | RS232 | |
| Chart recorder output | V | 2x10 |
| In/Outputs | PLC compatible | |
| Permissible ambient temperature (during operation ) | °C | +10.....+40 |
| Weight | kg lb | 110 242 |
| Dimensions ( L x W xH ) | mm in | 1068 x 525 x 850 42 x 21 x 33 |
| Supply voltages | V (AC) V (AC) V (AC) | 230 (±10%) 50Hz 115 (±10%) 60Hz 100 (±10%) 50/60Hz |
| Power consumption | VA | 1100 |
| Min. detectable leak rate for helium (vacuum mode) | mbar•L/s | < 5·10-12 |
| Min. detectable leak rate for helium (sniffer mode) | mbar•L/s | < 5·10-8 |
| Max. Inlet pressure GROSS mode | mbar | 15 |
| Max. Inlet pressure FINE mode | mbar | 2 |
| Max. Inlet pressure ULTRA mode | mbar | 0.4 |
| Fore vacuum pump type | Dry compressing | |
| Pumping speed during evacuation | m³/h | 25 at 50 Hz |
| Helium pumping speed ULTRA mode | L/s | 2.5 |
| Detectable masses | 2,3,4 amu | |
| Mass spectrometer Sector field | 180° | |
| Filaments ion source Iridium/Yttria coated | 2 | |
| Calibrated built-in leak | mbar•L/s | ∼ 10-7 |
| Test port | DN 25 KF/(DN 40 KF) | |
| Adjustable triggers | 2 | |
| Interface | RS 232 | |
| Chart recorder output | V | 2 x10 |
| In/Outputs | PLC compatible | |
| Permissible ambient temperature (during operation) | °C | +10 to +40 |
| Weight | kg lb | 110 242 |
| Dimensions (l x w x h) | mm in. | 1050 x 472 x 987 41 x 19 x 39 |
| Supply voltage (EU) | V (AC) | 230 (± 10 %) 50 Hz |
| Supply voltage (US) | V (AC) | 100/115 V (± 10 %) 50/60 Hz |
| Power consumption (typ.) | VA | 1100 |
| Power consumption (max.) | VA | 1100 |
Ordering Information
Part numbers
Accessories
| 550-000A | UL1000, 230 V AC, DN 25 KF |
| 550-001A | UL1000, 115 V AC, DN 25 KF |
| 550-002A | UL1000, 100 V AC, DN 25 KF |
| 550-100A | UL1000 Fab, 230 V AC, DN 25 KF |
| 550-101A | UL1000 Fab, 100/115 V AC, DN 25 KF |
| 550-102 | UL1000 Fab, 230 V AC, DN 40 KF |
| 14022 | Extension cable for remote control RC1000, 8 m length |
| 551-000 | Toolbox, detachable for UL1000 |
| 551-001 | Helium Bottle Holder for UL1000/5000 |
| 551-002 | ESD Mat for UL1000/5000 |
| 551-005 | TC1000 Test Chamber, DN 25 KF, ESD wrist band |
| 551-010 | Remote Control RC1000C, wired, with 4 m coiled cable |
| 551-015 | Remote Control RC1000WL, wireless, incl. wireless transmitter |
| 551-020 | Wireless transmitter for RC1000WL |
| 551-050 | SMART-Spray helium spray gun set |
| 551-031 | SPRAY-Check TL8 (not calibrated) |
Downloads
Brochures
Manuals
TC1000 Betriebsanleitung
pdf
•
340,5 KB
•
German
•
Operating Manual
Interface Description UL1000/5000
pdf
•
147,8 KB
•
French, German, Italian, Japanese, Korean, Polish, Russian, Spanish, Swedish, Chinese, Czech, English, Dutch, Portuguese, Hungarian, Romanian
•
Operating Manual
RC1000 Betriebsanleitung
pdf
•
2,1 MB
•
German
•
Operating Manual
RC1000 Notice d'utilisation
pdf
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2,1 MB
•
French
•
Operating Manual
RC1000 Operating instructions
pdf
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2,1 MB
•
English
•
Operating Manual
Schnüffelleitung SL200
pdf
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1,0 MB
•
German
•
Operating Manual
SMART-Spray Betriebsanleitung
pdf
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2,7 MB
•
German
•
Operating Manual
SMART-Spray Operating instructions
pdf
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2,7 MB
•
English
•
Operating Manual
Sniffer Line SL200
pdf
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1,1 MB
•
English
•
Operating Manual
TC1000 Operating Manual
pdf
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353,8 KB
•
English
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Operating Manual
UL1000 Fab Betriebsanleitung
pdf
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2,4 MB
•
German
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Operating Manual
UL1000 Fab Operating instructions FR
pdf
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3,0 MB
•
French
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Operating Manual
UL1000 Fab Operating instructions IT
pdf
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2,1 MB
•
Italian
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Operating Manual
UL1000 Fab Operating instructions NL
pdf
•
2,1 MB
•
Dutch
•
Operating Manual
UL1000 Fab Operating instructions PL
pdf
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2,2 MB
•
Polish
•
Operating Manual
UL1000 Fab Operation Manual
pdf
•
2,0 MB
•
English
•
Operating Manual
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