Helium Leak Detector

UL1000 / UL1000 Fab

Mobile Helium Leak Detectors with ULTRATEST™ sensor technology.

UL1000-Fab

The Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing

The INFICON UL1000 Helium Leak Detector Series is the renowned standard when it comes to economic helium vacuum leak testing in industrial (UL1000 with oil-sealed fore vacuum pumps) or semiconductor environments (UL1000 Fab with dry compressing fore vacuum pumps).

The UL1000 Series provides the best compromise between high performance, unparalleled robustness, and affordability. It delivers state-of-the art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design ensures high maneuverability facilitating easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) allows for continuous leak testing within at least two decades lower than existing background levels. 

These features collectively reduce the duration of your leak testing process while ensuring all leaks are detected efficiently and economically.

With the addition of the TC1000 Test Chamber accessory, the UL1000 Helium Leak Detector Series provides easy, fast and accurate testing of hermetically sealed parts like IC packages, quartz crystals and laser diodes (according to MIL-STD 883, Method 1014).

Essential Accessories: SMART-Spray, SPRAY-Check

The SMART-Spray helium spray gun enhances leak checking by eliminating the need for large helium cylinders and cumbersome hoses. It streamlines the process, reducing manual helium flow adjustments and minimizing errors. This tool makes leak detection faster, easier, and more reliable while maintaining low helium consumption and background levels. Ideal for efficient and precise leak testing.

SPRAY-Check, a spray on test leak, ensures the functionality and readiness of your leak detector. Ideal for the 10⁻⁹ to 10⁻⁸ mbar∙l/s range, it provides reliable checks during testing processes.

Advantages

  • minimize leak testing efforts through quick pump down and response time
  • avoid need for multiple leak tests by using selectable background suppression (I·ZERO)
  • I·CAL (Intelligent Calculation Algorithm for Leak rates)to ensure fastest response time to leaks in all measurement ranges
  • enable easy access to maintenance areas with restricted space through maneuverable design
  • low total cost of ownership (TCO) enabled by robust two hot filament ion source (3 years warranty) and counterflow vacuum system
  • easy to use with rotatable display, optical and audible leak indication, and optional remote control
  • low maintenance via a built-in test leak with auto calibration procedure
  • Software updates via email easily possible
  • Built-in software menu "Auto Leak Test" function to perform automatic testing of hermetically sealed components (optional TC1000 Test Chamber)

Typical Applications

  • industrial vacuum equipment manufacturing with high demand for cleanliness
  • vacuum components or sub-assemblies before they are installed in existing tools
  • maintenance work on vacuum tools, with or without support from their own pump
  • inspections and installations of process gas systems
  • semiconductor, flat panel display or solar cell manufacturing
  • automotive components
  • refrigeration and air conditioning components and sub-assemblies hermetically sealed electronic devices
  • heat exchangers

Specifications

UL1000
UL1000 Fab
Min. detectable leak rate for helium (vacuum method)mbar•L/s< 5·10-12
Min. detectable leak rate for helium (sniffer mode)mbar•L/s< 5·10-8
Max. Inlet pressure GROSS modembar15
Max. Inlet pressure FINE modembar2
Max. Inlet pressure ULTRA modembar0.4
Fore vacuum pump type Oil-sealed
Pumping speed during evacuation m³/h16 at 50 Hz
Helium pumping speed ULTRA modeL/s2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion soure Iridium/Yttria coated 2
Calibrated built in test leakmbar•L/sE-7
Test port DN 25 KF
Adjustable triggers 2
Interface RS232
Chart recorder outputV2x10
In/Outputs PLC compatible
Permissible ambient temperature (during operation )°C+10.....+40
Weightkg
lb
110
242
Dimensions ( L x W xH )mm
in
1068 x 525 x 850
42 x 21 x 33
Supply voltagesV (AC)
V (AC)
V (AC)
230 (±10%) 50Hz
115 (±10%) 60Hz
100 (±10%) 50/60Hz
Power consumptionVA1100
Min. detectable leak rate for helium (vacuum mode)mbar•L/s< 5·10-12
Min. detectable leak rate for helium (sniffer mode)mbar•L/s< 5·10-8
Max. Inlet pressure GROSS modembar15
Max. Inlet pressure FINE modembar2
Max. Inlet pressure ULTRA modembar0.4
Fore vacuum pump type Dry compressing
Pumping speed during evacuationm³/h25 at 50 Hz
Helium pumping speed ULTRA modeL/s2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in leakmbar•L/s∼ 10-7
Test port DN 25 KF/(DN 40 KF)
Adjustable triggers 2
Interface RS 232
Chart recorder outputV2 x10
In/Outputs PLC compatible
Permissible ambient temperature (during operation)°C+10 to +40
Weightkg
lb
110
242
Dimensions (l x w x h)mm
in.
1050 x 472 x 987
41 x 19 x 39
Supply voltage (EU)V (AC)230 (± 10 %) 50 Hz
Supply voltage (US)V (AC)100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.)VA1100
Power consumption (max.)VA1100

Ordering Information

Part numbers
Accessories
550-000AUL1000, 230 V AC, DN 25 KF
550-001AUL1000, 115 V AC, DN 25 KF
550-002AUL1000, 100 V AC, DN 25 KF
  
550-100AUL1000 Fab, 230 V AC, DN 25 KF
550-101AUL1000 Fab, 100/115 V AC, DN 25 KF
550-102UL1000 Fab, 230 V AC, DN 40 KF
551-050SMART-Spray helium spray gun set
551-031SPRAY-Check TL8 (not calibrated)
14005SL200 - 4 m, Sniffer Probe for UL product family
14006SL200 - 14 m, Sniffer Probe for UL product family
14022Extension cable for remote control RC1000, 8 m length
551-000Toolbox, detachable for UL1000
551-001Helium Bottle Holder for UL1000/5000
551-002ESD Mat for UL1000/5000
551-005TC1000 Test Chamber, DN 25 KF, ESD wrist band
551-010Remote Control RC1000C, wired, with 4 m coiled cable
551-015Remote Control RC1000WL, wireless, incl. wireless transmitter
551-020Wireless transmitter for RC1000WL

Downloads

Manuals
TC1000 Betriebsanleitung
pdf 340,5 KB German Operating Manual
Interface Description UL1000/5000
pdf 147,8 KB French, German, Italian, Japanese, Korean, Polish, Russian, Spanish, Swedish, Chinese, Czech, English, Dutch, Portuguese, Hungarian, Romanian Operating Manual
RC1000 Betriebsanleitung
pdf 2,1 MB German Operating Manual
RC1000 Notice d'utilisation
pdf 2,1 MB French Operating Manual
RC1000 Operating instructions
pdf 2,1 MB English Operating Manual
Schnüffelleitung SL200
pdf 1,0 MB German Operating Manual
SMART-Spray Betriebsanleitung
pdf 2,7 MB German Operating Manual
SMART-Spray Operating instructions
pdf 2,7 MB English Operating Manual
Sniffer Line SL200
pdf 1,1 MB English Operating Manual
SPRAY-Check Instrucciones de uso
pdf 595,7 KB Spanish Operating Manual
SPRAY-Check Instrukcje użytkowania
pdf 597,3 KB Polish Operating Manual
SPRAY-Check istruzioni per l'uso originali
pdf 595,2 KB Italian Operating Manual
SPRAY-Check mode d'emploi
pdf 597,2 KB French Operating Manual
SPRAY-Check Operating-instructions
pdf 594,5 KB English Operating Manual
SPRAY-Check Инструкция по применению
pdf 991,2 KB Russian Operating Manual
SPRAY-Check 使用說明 - Traditional Chinese
pdf 641,1 KB Chinese Operating Manual
SPRAY-Check 使用説明書
pdf 634,2 KB Japanese Operating Manual
SPRAY-Check 说明 - Simplified Chinese
pdf 124,9 KB Chinese Operating Manual
SPRAY-Check 사용 방법
pdf 583,8 KB Korean Operating Manual
TC1000 Operating Manual
pdf 353,8 KB English Operating Manual
UL1000 Fab Betriebsanleitung
pdf 2,4 MB German Operating Manual
UL1000 Fab Operating instructions FR
pdf 3,0 MB French Operating Manual
UL1000 Fab Operating instructions IT
pdf 2,1 MB Italian Operating Manual
UL1000 Fab Operating instructions NL
pdf 2,1 MB Dutch Operating Manual
UL1000 Fab Operating instructions PL
pdf 2,2 MB Polish Operating Manual
UL1000 Fab Operation Manual
pdf 2,0 MB English Operating Manual
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