UL6000 Fab Series
UL6000 Fab / UL6000 Fab PLUS Leak Detectors
ULTRATEST™ sensor technology
Sets new standards for speed and precision in leak testing.
Product configurator
Gemini™ MxG5xx
Helium Leak Detector Series for Semiconductor Applications
The INFICON UL6000 Fab Product Series is designed to meet the most critical and demanding leak detection applications. Featuring INFICON proprietary software algorithms I·CAL and HYDRO·S in a field-proven vacuum design, the UL6000 provides testing flexibility, high sensitivity and quick accurate results making any leak detection application fast and easy.
The UL6000 delivers fastest response times in all measurement ranges and extremely short cycle times in reaching test conditions and final results. The specially designed vacuum architecture provides the continuous high helium pumping speeds and the extremely fast response times you demand.
Efficient leak testing
Leak detection is both time-consuming and complex. By measuring rate-of-rise, semiconductor- and vacuum equipment is continuously monitored during operation. Upon leak indication by this integral leak test, leak positions are then localized using the helium spraying method allowing for the required repair. This is followed by another leak test using pressure increase or so-called vacuum decay measurement – an intricate process which needs to be repeated until all leaks are detected. Moreover, to be as precise as possible, measurement times for this procedure are often particularly long for large equipment volumes. Thanks to I·RISE, our Intelligent Rate-of-rise feature, the UL6000 Fab PLUS performs pressure increase measurement all by itself and combines it with the helium spraying method. Our patented system enables measurement times to drop drastically, and thus helps minimize both general time for leak testing and fab equipment maintenance. Experience even faster and more precise measurement results – in under 10 seconds, independent of chamber volume.
Optimized Leak Testing with SMART-Spray, I·BOOST and SPRAY-Check
SMART-Spray helium spray gun enhances leak checking by eliminating the need for large helium cylinders and cumbersome hoses. It streamlines the process, reducing manual helium flow adjustments and minimizing errors. This tool makes leak detection faster, easier, and more reliable while maintaining low helium consumption and background levels. Ideal for efficient and precise leak testing.
I·BOOST offers up to 50% time savings in leak detection. With shorter response times, it delivers fast and precise measurements across various chamber volumes, enhancing efficiency and accuracy. Additionally , SPRAY-Check, a spray on test leak, ensures the functionality and readiness of your leak detector. Ideal for the 10⁻⁹ to 10⁻⁸ mbar∙l/s range, it provides reliable checks during testing processes.
Advantages
Fab Product Series
- ULTRATEST Sensor Technology
- HYDRO-S (HYDROgen-Suppression) to enable test conditions to be reached quickly.
- I-CAL (Intelligent - Calculation Algorithm for Leak Rates) to ensure fast response to leaks in all measurement ranges.
- A special multiple inlet turbomolecular pump that provides optimized high helium pumping speeds with high helium compression at all pressures to deliver excellent sensitivity, response, and fast clean-up.
- A booster turbomolecular pump for extremely fast response on any test object, including the largest volumes and chambers.
- The field-proven INFICON magnetic sector mass spectrometer for years of accurate and repeatable results in a trouble-free, maintenance-free design.
- Self-protection features to protect the UL6000 from helium and particulate contamination and even an auto-purge cycle to ensure the UL6000 is ready when you need it.
- A rotatable display / control interface and optional remote hand controller for operational flexibility.
- Access control to the unit and system software can be enabled via the software to prevent unauthorized use or unintended modifications to test set-ups.
- Software updates via e-mail to keep your UL6000 at optimum performance.
- Work Station Design with an optimal height work surface that includes an ESD mat and tool box for testing convenience.
Fab PLUS Product Series
- Featuring I·RISE, our intelligent rate-of-rise: Provides in-device pressure increase testing combined with helium spraying method
- Rate-of-rise measurements in under 10 seconds
- Helps minimize general time for leak testing and fab equipment maintenance
- More speed, more precision
Typical Applications
- Leak testing of components, subassemblies and large chambers used on semiconductor and flat panel display tools
- Leak testing of semiconductor and flat panel tools
- Leak testing of aerospace components, subassemblies, and systems
- Leak testing of storage vessels/storage tanks
Specifications
| Min. detectable leak rate for helium (vacuum method) | mbar∙L/s | <5∙10-12 |
| Min. detectable leak rate for helium (sniffer mode) | mbar∙L/s | <5∙10-8 |
| Max. inlet pressure (MASSIVE mode) | atm (~1013 mbar) | |
| Type of roughing pump | roots | |
| Max. pumping speed of roughing pump | m³/h | >36 |
| Pumping speed @ inlet (100-1000 mbar) | m³/h | 23 |
| Pumping speed @ inlet (10-100 mbar and 1-10 mbar) | m³/h | 26 |
| Max. Helium pumping speed (ULTRA Mode) | L/s | >36 |
| Max. helium pumping speed DN63 reduced to DN40 | L/s | ~ 30 |
| Response time for 50 L | s | 1.4 |
| Evacuation time to 1 mbar 50 L | s | 52 |
| Evacuation time to 1 mbar 100 L* | s | 104 |
| Evacuation time to 1 mbar 500 L* | s | 527 |
| Evacuation time to 1 mbar 1000 L* | s | 1054 |
| Venting 50 L to atm. 16 s | s | 16 |
| Run up time for operation | min | <2 |
| Time for calibration | s | <30 s |
| Inlet flange | DN63 ISO-K | |
| Detectable masses (ULTRATEST Sensor Technology) | 2,3,4 (H2, 3He, He) | |
| Supply voltage | V | 100 to 230, 50/60 Hz |
| Max. Power Consumption | VA | 1500 |
| Typ. Power Consumption | VA | 700 |
| Weight | kg | 143 |
| Dimensions (LxWxH) | mm in. | 1050x427x1040 42x21x41 |
| *extrapolated |
| Min. detectable leak rate for helium (vacuum method) | mbar∙L/s | <5∙10-12 |
| Min. detectable leak rate for helium (sniffer mode) | mbar∙L/s | <5∙10-8 |
| Max. inlet pressure (MASSIVE mode) | atm (~1013 mbar) | |
| Type of roughing pump | roots | |
| Max. pumping speed of roughing pump | m³/h | >36 |
| Pumping speed @ inlet (100-1000 mbar) | m³/h | 23 |
| Pumping speed @ inlet (10-100 mbar and 1-10 mbar) | m³/h | 26 |
| Max. Helium pumping speed (ULTRA Mode) | L/s | >36 |
| Max. helium pumping speed DN63 reduced to DN40 | L/s | ~ 30 |
| Response time for 50 L | s | 1.4 |
| Evacuation time to 1 mbar 50 L | s | 52 |
| Evacuation time to 1 mbar 100 L* | s | 104 |
| Evacuation time to 1 mbar 500 L* | s | 527 |
| Evacuation time to 1 mbar 1000 L* | s | 1054 |
| Venting 50 L to atm. 16 s | s | 16 |
| Run up time for operation | min | <2 |
| Time for calibration | s | <30 s |
| Time for rate-of-rise measurement (I·RISE) | s | <10 |
| Inlet flange | DN63 ISO-K | |
| Detectable masses (ULTRATEST Sensor Technology) | 2,3,4 (H2, 3He, He) | |
| Supply voltage | V | 100 to 230, 50/60 Hz |
| Max. Power Consumption | VA | 1500 |
| Typ. Power Consumption | VA | 700 |
| Weight | kg | 143 |
| Dimensions (LxWxH) | mm in. | 1050x427x1040 42x21x41 |
| *extrapolated |
Ordering Information
| 550-520 | UL6000 Fab |
| 550-530 | UL6000 Fab PLUS |
| 551-050 | SMART-Spray ***NEW |
| 551-600 | I·BOOST software license***NEW |
| 551-031 | SPRAY-Check TL8***NEW |
| 551-225 | DN63-ISO K Connection Kit (1x hose 1 m, 1x 90° elbow, 2x center ring, 2x clamp set) |
| 551-226 | Metal hose, DN63 ISO-K/DN50 ISO-KF |
| 551-227 | Metal hose, DN63 ISO-K/DN40 ISO-KF |
| 551-015 | Remote Control RC1000WL, wireless, incl. wireless transmitter |
| 551-010 | Remote Control RC1000C, wired, with 4m coiled cable |
| 551-202 | Vacuum Hose Holder for UL3000 Fab (incl. for ULTRA version) |
| 525-001 | SL3000-3, sniffer line 3 m length |
| 525-002 | SL3000-5, sniffer line 5 m length |
| 525-003 | SL3000-10, sniffer line 10 m length |
| 551-203 | Bracket for SL3000 |
| 551-210 | SL200, Sniffer line + el. extension for UL3000 |
| 551-201 | Helium Bottle Holder |
| 560-310 | I/O 1000 module |
| 560-315 | BM1000 PROFIBUS module |
| 560-316 | BM1000 PROFINET IO module |
| 560-317 | BM1000 DeviceNet module |
| 560-318 | BM1000 Ethernet/IP module |
| 560-334 | Data Cable for IO1000,BM1000, 0.5m |
| 560-332 | Data Cable 2 m |
| 560-335 | Data Cable 5 m |
| 560-340 | Data Cable 10 m |
| 551-600 | I·BOOST software license***NEW |
| 551-031 | SPRAY-Check TL8***NEW |
| 200007656 | Airfilter Kit UL3 Housing Ventilation |
