RF Sensing Technology

ADC100

Non- Invasive, high speed, DC arc dection for real-time process control

The ADC100 DC Arc Detector system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.

Features

Software integration to the tool through FabGuard Sensor Integration and Analysis System
Data collection at 250 kHz per channel
Custom cables connect to most DC generators
Detects arcs quickly with pre-defined analysis tools
Endpoint detection capability
Worldwide application support