1. IC6
Controllers

IC6

Making Excellence Repeatable

IC6

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. 

The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

Features

  • INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
  • Codeposition of up to six sources simultaneously
  • Color TFT LCD display makes it easy to see what's going on with your process
  • +/-0.0035 Hz over 100ms sample
  • USB data storage for screen shots, recipe storage and data logging
  • Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
  • 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
  • Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
  • Multiple sensor averaging for up to 8 sensors
  • 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
  • Optional Ethernet communications
  • Optional IC6 Configuration Editor Software (part number 781-620-G1) - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
  • RoHS compliant

Typical Applications

  • High End Optical Coating

Specifications

Measurement Performance
Thickness and rate resolution/measurement (1)±0.00433 Å
Measurement frequency range

6.0 to 4.5 MHz (fixed)

 

Process Recipe & Data Management
Material programs32
Process layers (per process)200
Processes

50 (processes can be linked together)

 

Number of sources (2)

up to 6

 

  
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz
(2) The IC6 has 6 DAC outputs standard, 6 more can be added as an option.  Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6

Part Number

Accessories
Consumables
NameDescription
Front Load Single SensorFront Load Single Sensor
Front Load Dual SensorFront Load Dual Sensor
Cool Drawer Single SensorCool Drawer Single Sensor
Cool Drawer Dual SensorCool Drawer Dual Sensor
Easy Rate Single SensorEasy Rate Single Sensor
Easy Rate Dual SensorEasy Rate Dual Sensor
UHV Bakeable SensorUHV Bakeable Sensor
ALD SensorALD Sensor
Sputtering SensorSputtering Sensor
CrystalSix® SensorCrystalSix® Sensor
Crystal 12® Sensor

Crystal 12® Sensor

 

Accessories and Replacement Parts
Part NumberDescription
779-220-G1CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits(Includes oscillator and cables)
781-611-G15XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G30XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G50XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G100XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G154m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G304m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G504 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G1004m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G154m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G304m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G504m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G1004m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
Oscillator Only(No cables included)
781-600-G1XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3
781-600-G2XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6
Cables 
600-1261-P10030.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P154.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P309.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P5015.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
755-257-G615.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
Configuration Editor Software 
781-620-G1IC6 Configuration Editor Software - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
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