1. RSH-600 Rotary Sensor
Sensors & Feedthroughs

RSH-600 Rotary Sensor

Excellent Crystal Performance in Demanding Applications

RSH-600-Rotary-Sensor

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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RSH-600 Rotary Sensor Heads are designed for demanding processes, employing very thick films and several different materials. The RSH-600 holds six crystals in a thermally shielded, water-cooled housing, ensuring excellent crystal performance in temperature environments up to 300°C. Crystals are housed in an easy to remove Teflon® and stainless steel crystal holder.

Features

  • Six crystals
  • Position feedback (Controller dependent)
  • Adjustable length (with optional flange)
  • Rugged design

Specifications

Number of crystals6
Installation aperture50.8 mm (2.0 in.) diameter
Operating temperature (with water cooling)300° C max with stainless steel head cover
400° C max with copper head cover
Download full specifications

Accessories

Accessories
Consumables
Spare Parts
Part NumberDescription
153202Adjustable flange
153204Crystal Retainer Assembly, Flat
153204-2Crystal Retainer Assembly, Angled
153731RSH-600 Sensor Head Cover, Copper, Flat
153731-2RSH-600 Sensor Head Cover, Copper, Angled
153708RSH-600 Sensor Head Cover, Stainless Steel, Flat
153713RSH-600 Sensor Head Cover, Stainless Steel, Angled
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
Part NumberDescription
153706Spring Retainer assembly Flat
15370724 VDC Solenoid valve assembly
153709Retaining Screw for Flat crystal retainer
153710Crystal Holder Flat (includes 153709)
153714Spring Retainer Assembly, Angled,RSH-600
153715Retainer Screw for angled crystal retainer
153716Crystal Holder, Angled, RSH-600
153722Signal/Ground Contact Module, RSH-600
153724Spring retainer contact kit - Flat (set of six)
153726Crystal Contact for Crystal Retainer Assembly
8891287 pin male connector
889128-27-pin Female Connector
144-101M3x6 SOC Head Screw for Flat Crystal Retainer
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