SemiQCM® CR Sensors for Precursor Monitoring
Making Excellence Repeatable
Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
The SemiQCM CR sensor is a chemically inert sensor that can be installed in some of the harshest CVD or ALD chambers. SemiQCM CR is one component of a system for precursor monitoring, with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
Semi Process Monitoring can be used in semiconductor applications for endpoint detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.
The failure to deliver precursor to a wafer can be detected in as little as one wafer.
Features
- QCM data monitored at 10 Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
Advantages
- Real-time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
Typical Applications
- Semiconductor Manufacturing
Specifications
| Maximum Temperature | 200°C |
| Sensor Head Size (maximum envelope) | 23.9 mm O.D. x 29.2 mm (0.94 in. O.D. x 1.15 in.) |
| Sensor Length (in vacuum) | 50–150 mm (1.97–5.91 in.) |
| Mounting Feedthrough | ISO KF/CF flange |
| Materials | |
| Body and Holder | Aluminum |
| Springs | Beryllium nickel |
| Coax Line | 6.4 mm (0.250 in.) O.D., nickel 625 |
| Other Mechanical Parts | Nickel 200, aluminum, or nickel C276 |
| Insulators | >96% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | Ni in vacuum, Ni-plated Cu elsewhere |
| Braze | Vacuum-process high-temperature NiCr alloy |
| Crystal | 14.0 mm (0.551 in.) diameter |
Consumables
| Part Number | Description |
| 750-7053-G1S | 8 mm CR Crystal Holder Assembly with Alloy Crystal Installed |
| 750-7053-G2S | 8 mm CR Crystal Holder Assembly with Alumina Crystal Installed |
| 750-7053-G3S | 8 mm CR Crystal Holder Assembly with Yttria Crystal Installed |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
| 750-1089-G10 | SENSOR CRYSALS, 6 MHZ, ALLOY, 8 mm, 10 crystals |
| 750-1127-G5 | SENSOR CRYSTALS, 6 MHz, ALUMINA, 8 mm, 5 crystals |
| 750-1128-G5 | SENSOR CRYSALS, 6 MHZ, YTTRIA, 8 mm, 5 crystals |
Spare parts
| Part Number | Description |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
