SemiQCM™ CR Sensors for Precursor Monitoring
Making Excellence Repeatable
Product configurator
Gemini™ MxG5xx
Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
The SemiQCM™ CR sensor is a chemically inert sensor that can be installed in some of the harshest CVD or ALD chambers. SemiQCM CR is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
Semi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.
The failure to deliver precursor to a wafer can be detected in as little as one wafer.
Features
- QCM data monitored at 10Hz
- FabGuard correlates QCM data to tool state and process step
- Precise measurement of deposition or etch rates
- Sensitivity & precision for sub-monolayer thickness measurement
Advantages
- Real-Time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
Typical Applications
- Semiconductor Manufacturing
Specifications
| Maximum Temperature | 200°C |
| Sensor head Size (Maximum envelope) | 15 mm O.D. x 39.2 mm (0.59 in. O.D. x 1.54 in.) |
| Materials | |
| SemiQCM CR Body and Holder | 6061 Aluminum |
| SemiQCM CR Springs | Beryllium Nickel |
| SemiQCM CR Nut and Conductor Tube | Inconel 625 |
| SemiQCM CR Other Mechanical Parts | Nickel 200, Aluminum, or Inconel 625 |
| Insulators | >99% Al2O3 in vacuum: Teflon® used elsewhere |
| Wire | 1. Ni (in vacuum) 2. Ni plated Cu (elsewhere) |
Consumables
| Part Number | Description |
| 750-7053-G1S | 8 mm CR Crystal Holder Assembly with Alloy Crystal Installed |
| 750-7053-G2S | 8 mm CR Crystal Holder Assembly with Alumina Crystal Installed |
| 750-7053-G3S | 8 mm CR Crystal Holder Assembly with Yttria Crystal Installed |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
| 750-1089-G10 | SENSOR CRYSALS, 6 MHZ, ALLOY, 8 mm, 10 crystals |
| 750-1127-G5 | SENSOR CRYSTALS, 6 MHz, ALUMINA, 8 mm, 5 crystals |
| 750-1128-G5 | SENSOR CRYSALS, 6 MHZ, YTTRIA, 8 mm, 5 crystals |
Spare parts
| Part Number | Description |
| 750-7055-G1S | Crystal Holder, Finger Spring, and Retainer Spring Spare Assembly |
