Sensors & Feedthroughs
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![967-Easy-Rate-Single-Sensor 967-Easy-Rate-Single-Sensor](/uploads/media/323x215/07/967-Easy-Rate-Single-Sensor.png?v=1-0)
cost effective solution to high-accuracy thickness monitoring for short optical and batch coating processes
- Minimum investment with lowest upfront cost
- Lowest total cost of ownership from extended sensor life
- Maximum throughput with less maintenance
- Easy installation
![976-Front-Load-Single-Sensor 976-Front-Load-Single-Sensor](/uploads/media/323x215/06/976-Front-Load-Single-Sensor.png?v=1-0)
Proven reliability and durability and the best thermal stability of any sensor head on the market.
- Front load crystal holder
- Easy installation
- Available with 2.54 cm (1 inch) bolt feedthrough / CF40 Feedthrough
- Adjustable length if ordererd with compression fittings
![965-Front-Load-Dual-Sensor 965-Front-Load-Dual-Sensor](/uploads/media/323x215/05/965-Front-Load-Dual-Sensor.png?v=1-0)
proven reliability and durability
- Dual crystals
- Crystal shutter
- Front load crystal holder
- Easy installation
![961-Cool-Drawer-Single-Sensor 961-Cool-Drawer-Single-Sensor](/uploads/media/323x215/01/961-Cool-Drawer-Single-Sensor.png?v=1-0)
allow crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation
- No internal cables
- Cool Drawer crystal holder
- Easy installation
- Bakeable if ordered with welded CF40 flange
![980-Cool-Drawer-Dual-Sensor 980-Cool-Drawer-Dual-Sensor](/uploads/media/323x215/00/980-Cool-Drawer-Dual-Sensor.png?v=1-0)
designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber
- Dual crystals
- Cool Drawer crystal holder
- No internal cables
- Crystal shutter
![974-Easy-Rate-Dual-Sensor 974-Easy-Rate-Dual-Sensor](/uploads/media/323x215/04/974-Easy-Rate-Dual-Sensor.png?v=1-0)
simple and inexpensive solution for QCM applications where one crystal may not be enough
- Dual crystals
- Low in price, high in quality
- Front load crystal holder
- Includes crystal shutter
![978-UHV-Bakeable-Sensor 978-UHV-Bakeable-Sensor](/uploads/media/323x215/08/978-UHV-Bakeable-Sensor.png?v=1-0)
offer proven reliability and durability and have the best thermal stability of any sensor head on the market
- High temperature braze & welded construction
- Bakeout temperatures to 450° C
- Crystal shutter (option)
- Front load crystal holder
![968-ALD-Sensor 968-ALD-Sensor](/uploads/media/323x215/08/968-ALD-Sensor.png?v=1-0)
repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD)
- Operating temperature up to 450°C
- Gas purge line keeps back of crystal free of depsotion material
- Welded Conflat flange (CF40) option
- O-ring compression fitting option
![957-Sputtering-Sensor 957-Sputtering-Sensor](/uploads/media/323x215/07/957-Sputtering-Sensor.png?v=1-0)
designed for use in any sputtering process
- Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
- Magnet to deflect free electrons away from the monitor crystal
- Easy installation with bendable water tubes allowing flexibility in sensor placement
- Rear load crystal insertion for easy crystal replacement
![975-CrystalSix-Sensor 975-CrystalSix-Sensor](/uploads/media/323x215/05/975-CrystalSix-Sensor.png?v=1-0)
CrystalSix Sensor is critical for long processes demanding continuous rate control
- Holds 6 crystals with robust, automatic switching to maximize process uptime
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat-generating motors)
- 1/8" tubes maintain thermal stability and allow flexibility in sensor placement
- Optional crystal shutter available
![958-RSH-600-Rotary-Sensor 958-RSH-600-Rotary-Sensor](/uploads/media/323x215/08/958-RSH-600-Rotary-Sensor.png?v=1-0)
designed for demanding processes, employing very thick films and several different materials
- Six crystals
- Position feedback (Controller dependent)
- Adjustable length (with optional flange)
- Rugged design
![964-Crystal-12-Sesor 964-Crystal-12-Sesor](/uploads/media/323x215/04/964-Crystal-12-Sesor.png?v=1-0)
Replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller
- Holds 12 crystals with robust, automatic switching to maximize process up-time
- Easy-to-remove carousel allows fast replacement of all 12 crystals
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
- Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
![1171-QCM-Sensor-Feedthroughs 1171-QCM-Sensor-Feedthroughs](/uploads/media/323x215/01/1171-QCM-Sensor-Feedthroughs.png?v=1-0)
Variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available Ultra-Torr O-ring compression fittings
- Custom feedthrough configurations available
- Other feedthrough styles available on request
![959-Sensor-Feedthroughs 959-Sensor-Feedthroughs](/uploads/media/323x215/09/959-Sensor-Feedthroughs.png?v=2-0)
2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available, available with bored-through tube fittings
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available with bored-through tube fittings