Sensors & Feedthroughs
Sputtering Sensor
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Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Sputtering Sensor is specifically designed for use in any sputtering process.
The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.
Features
- Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
- Magnet to deflect free electrons away from the monitor crystal
- Easy installation with bendable water tubes allowing flexibility in sensor placement
- Rear load crystal insertion for easy crystal replacement
Specifications
| Maximum bakeout temp with no water | 105°C |
| Maximum operating isothermal environment temperature with minimum water flow | 400° C |
| Crystal exchange | Rear-loading |
| Magnet | ALNICO 5 Alloy |
Part Number
| Part Number | Description |
| 750-618-G1 | Sputtering Sensor (sensor only, feedthrough not included) |
Accessories
Consumables
Spare Parts
| Name | Description |
| QCM Sensor Feedthroughs | QCM Sensor Feedthroughs
|
| Sputtering Sensor | |
| Part Number | Description |
| 750-420-G1 | Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors) |
| Name | Description |
|---|---|
| Quartz Monitor Crystals | Quartz Monitor Crystals |
| Sputtering Sensor | |
| Part Number | Description |
| 007-023 | Ceramic Retainer |
| 007-049 | Crystal Holder, Sputtering Sensor |
| 007-007 | Retainer spring (for crystal holder) |
| 007-047 | Sputtering head cover with water lines |
| 007-009 | Magnet for sputtering head cover |
| 070-0440 | Retaining ring (installs onto shaft of shutter assembly) |
| 070-0442 | Retaining ring (installs onto shaft of shutter assembly) |
| 070-0441 | Spacer (installs onto shaft of shutter assembly) |
| 082-044 | Teflon screw (for leaf spring) |
| 082-029-P1 | 2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body |
| 750-009-P2 | Pivot cover (installs onto shaft of shutter assembly) |
| 750-046-G2 | Shutter assembly for pneumatic shutter assembly |
| 750-048-P1 | Retainer spring for 007-048 and 751-619-G1 sputtering head bodies |
| 750-115-P4 | Coupling (installs onto bellows assembly) |
| 750-169-P4 | Bellows assembly for pneumatic shutter assembly |
| 750-174-P2 | Female coax |
| 750-175-P1 | Insulator (underneath leaf spring) |
| 008-007 | CRYSTAL SNATCHER |
| 750-188-P3 | Leaf Spring |
| 750-619-G1 | Sputtering head body with coax connector |
| 750-626-P1 | Spring for sputtering head cover
|
| In-vacuum cables | |
| 321-039-G12 | In-vacuum cable, 15.2 cm (6 in.) |
| 007-252 | In-vacuum cable, 30.5 cm (12 in.) |
| 321-039-G11 | In-vacuum cable, 61.0 cm (24 in.) |
| 007-044 | In-vacuum cable, 78.1 cm (30.75 in.) |
| 007-059 | In-vacuum cable, 91.4 cm (36 in.) |
| 007-061 | In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller |
| 321-039-G13 | In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller |
| 321-039-G14 | In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller |
| 321-039-G15 | In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU |
| 321-039-G16 | In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU |
The product is used in the following markets
