1. XTC/3
Controllers

XTC/3

Advanced, Affordable Rate Control for Single or Multiple Layers

XTC3M

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.

INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.

Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.

Worldwide INFICON Support

No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition controllers to offer you local service and technical support around the world.

Features

  • Available in single-layer and multiple-layer models
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping
  • Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
  • XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
  • Easy-to-read TFT LCD graphics displays
  • Films and processes can be assigned unique, descriptive names for easy retrieval
  • Ethernet connection available
  • Free-standing (no computer necessary) or optional Windows® software for PC operation
  • Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)

Typical Applications

  • High End Optical Coatings

Specifications

XTC3/S
XTC3/M
Measurement Frequency Range6.0 to 5.0 MHz (fixed)
Thickness & Rate Resolution / Measurement (1)±0.034 Å
Number of Sensor Inputs2
Number of Source Outputs2
  
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz
Measurement Frequency Range6.0 to 5.0 MHz (fixed)
Thickness & Rate Resolution / Measurement (1)±0.034 Å
Number of Sensor Inputs2
Number of Source Outputs2
  
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz

Part Number

XTC3 Part Number
pdf • 1,8 MB
Accessories
Accessories and Replacement Parts
Consumables
NameDescription
Front Load Single SensorFront Load Single Sensor
Front Load Dual SensorFront Load Dual Sensor
Cool Drawer Single SensorCool Drawer Single Sensor
Cool Drawer Dual SensorCool Drawer Dual Sensor
Easy Rate Single SensorEasy Rate Single Sensor
Easy Rate Dual SensorEasy Rate Dual Sensor
ALD SensorUHV Bakeable Sensor
UHV Bakeable SensorSputtering Sensor
Sputtering SensorCrystalSix® Sensor
CrystalSix® SensorCrystal 12® Sensor
Crystal 12® SensorRSH-600 Rotary Sensor
Part NumberDescription
755-262-G1Handheld Power Controller (for manual power control)
780-702-G1One unit rack mount kit - Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack
780-702-G2Two unit rack mount kit - Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack
780-032-G1Editor Software, XTC/3
779-220-G1CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits(Includes oscillator and cables)
780-611-G15XIU PKG with 15 ft. (4.6 m) cable - Fore use with XTC/3
780-611-G30XIU PKG with 30 ft. (9.1 m) cable - For use with XTC/3
780-611-G50XIU PKG with 50 ft. (15.2 m) cable - For use with XTC/3
780-611-G100XIU PKG with 100 ft. (30.5 m) cable - For use with XTC/3
780-612-G154m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G304m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G504m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-612-G1004m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G154m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G304m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G504m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
780-613-G1004m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3
Oscillator Only(No cables included)
780-600-G1XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 6 in. to 72 in. (15 cm to 183 cm)
780-600-G2XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 118 in. to 157 in. (3 m to 4 m)
Cables 
755-257-G615.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P154.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P309.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P5015.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P10030.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
NameDescription
Quartz Monitor CrystalsQuartz Monitor Crystals
The product is used in the following market
Vacuum_Coating-Navi
Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

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