Zevision® IMC300
Precision Control for Maximum Repeatability and Unmatched Crystal Efficiency
Product configurator
Gemini™ MxG5xx
The INFICON IMC300 is part of the next generation Zevision deposition controllers which offer new patented technology needed for today's optical coaters.
ModeLock Measurement System
INFICON Zevision IMC300 uses the INFICON ModeLock™ measurement system to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise. The ModeLock measurement system will maximize uptime and throughput by extending the usable crystal life - in some cases more than twice the expected life of a frequency counting controller.
Easy System Integration
System integration with INFICON Zevision IMC300 is fast and easy with backwards compatibility, logic, and the optional ability to run multiple sources at the same time using a single controller. INFICON Zevision IMC300 features a touchscreen front panel with easy to navigate menus and intuitive recipe building. Writing software is greatly simplified by only using ASCII printable characters with clear start and stop characters in all commands and responses. The new serial communication protocol also has help commands to learn what commands are available without referencing the operating manual.
Upgrades and After-care Plan
All firmware updates and hardware upgrades can now be performed on-site with easy to install option cards and firmware updates via the front panel USB port. Optional I/O and 2-sensor-2-source measurement boards are available for field installation with no additional tools.
Although INFICON Zevision IMC300 is built to last for decades, you can rest assured that repairs are free within the optional after-care plan period. Optional 2-year or 4-year after-care plans are available to extend beyond the standard 2-year warranty in the event your INFICON Zevision IMC300 needs repair. If the IMC300 has an after-care plan, a loaner unit can be provided if service is needed throughout the life of the instrument.
Advantages
- Maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise using the ModeLock measurement system
- Maximize number of runs possible while lowering crystal consumable cost with ModeLock (longest usable crystal life)
- Minimize integration cost and maximize integration speed with backwards compatibility, logic, and the optional ability to run multiple sources during a single process at the same time with a single controller
- Minimize development risk and optimize system performance through worldwide expert applications support
Specifications
MEASUREMENT | |
Crystal Frequency Range | 6.0 to 4.5 MHz |
Frequency Resolution | ±0.00656 Hz @ 6 MHz |
Frequency Accuracy | ±2.5 ppm 0 to 50°C |
Measurement Rate | 10 Hz |
Thickness and Rate Resolution | ±0.008 Å and ±0.08 Å/s |
Thickness Accuracy | 0.5% |
Rate Accuracy | 0.1% |
Spare Parts
Part Number | Description |
051-1509S | Power Supply AC Input Spare |
051-1510S | Fuse Drawer Spare |
062-0128S | Fuse Spare |
786-021-G1S | Hardware Spare Kit |
786-210-G1S | Front Panel Assembly IMC300 Spare |
786-211-G1S | Chassis Weld Assembly Spare |
786-303-P1S | Bottom Cover Spare |
786-304-P1S | Top Cover Spare |
786-310-P1S | Card Guide Top Spare |
786-311-P1S | Partition Spare |
786-350-P1S | Controller Card Faceplate Spare |
786-351-P1S | Faceplate Blank Spare |