CONTROLLERS

Zevision® IMC300

Precision Control for Maximum Repeatability and Unmatched Crystal Efficiency

300-L

Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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The INFICON IMC300 is part of the next generation Zevision deposition controllers which offer new patented technology needed for today's optical coaters.

ModeLock Measurement System

INFICON Zevision IMC300 uses the INFICON ModeLock™ measurement system to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise. The ModeLock measurement system will maximize uptime and throughput by extending the usable crystal life - in some cases more than twice the expected life of a frequency counting controller.

Easy System Integration

System integration with INFICON Zevision IMC300 is fast and easy with backwards compatibility, logic, and the optional ability to run multiple sources at the same time using a single controller. INFICON Zevision IMC300 features a touchscreen front panel with easy to navigate menus and intuitive recipe building. Writing software is greatly simplified by only using ASCII printable characters with clear start and stop characters in all commands and responses. The new serial communication protocol also has help commands to learn what commands are available without referencing the operating manual.

Upgrades and After-care Plan

All firmware updates and hardware upgrades can now be performed on-site with easy to install option cards and firmware updates via the front panel USB port. Optional I/O and 2-sensor-2-source measurement boards are available for field installation with no additional tools.

Although INFICON Zevision IMC300 is built to last for decades, you can rest assured that repairs are free within the optional after-care plan period. Optional 2-year or 4-year after-care plans are available to extend beyond the standard 2-year warranty in the event your INFICON Zevision IMC300 needs repair. If the IMC300 has an after-care plan, a loaner unit can be provided if service is needed throughout the life of the instrument.

IMC 300_Left Side+Circuit board
IMC 300_Left Side+Circuit board

Advantages

  • Maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise using the ModeLock measurement system 
  • Maximize number of runs possible while lowering crystal consumable cost with ModeLock (longest usable crystal life)
  • Minimize integration cost and maximize integration speed with backwards compatibility, logic, and the optional ability to run multiple sources during a single process at the same time with a single controller
  • Minimize development risk and optimize system performance through worldwide expert applications support

Specifications

MEASUREMENT 
Crystal Frequency Range6.0 to 4.5 MHz
Frequency Resolution±0.00656 Hz @ 6 MHz
Frequency Accuracy±2.5 ppm 0 to 50°C
Measurement Rate10 Hz
Thickness and Rate Resolution±0.008 Å and ±0.08 Å/s
Thickness Accuracy0.5%
Rate Accuracy0.1%
  
  
Download full specifications

Spare Parts

Part NumberDescription
051-1509SPower Supply AC Input Spare
051-1510SFuse Drawer Spare
062-0128SFuse Spare
786-021-G1SHardware Spare Kit
786-210-G1SFront Panel Assembly IMC300 Spare
786-211-G1SChassis Weld Assembly Spare
786-303-P1SBottom Cover Spare
786-304-P1STop Cover Spare
786-310-P1SCard Guide Top Spare
786-311-P1SPartition Spare
786-350-P1SController Card Faceplate Spare
786-351-P1SFaceplate Blank Spare

Zevision Part Number Configurator

ZevisionCongfigurationArt
ZevisionCongfigurationArt

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