Thin Film Technology
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![962-Research-Crystals 962-Research-Crystals](/uploads/media/323x215/02/962-Research-Crystals.png?v=1-0)
Quartz crystals are needed to monitor deposition rate in situ, collect accurate measurement data, and provide a means to analyze research applications.
- Maximize process performance with quality, reliability, and support
- Diminish Process Risk with a wide array of electrode material choices for compatibility to liquid and gas processes
- Each crystal is tested and inspected to ensure quality and the highest accuracy and reliability
- Obtain knowledgeable and personalized support for your unique application
![968-ALD-Sensor 968-ALD-Sensor](/uploads/media/323x215/08/968-ALD-Sensor.png?v=1-0)
repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD)
- Operating temperature up to 450°C
- Gas purge line keeps back of crystal free of depsotion material
- Welded Conflat flange (CF40) option
- O-ring compression fitting option
![980-Cool-Drawer-Dual-Sensor 980-Cool-Drawer-Dual-Sensor](/uploads/media/323x215/00/980-Cool-Drawer-Dual-Sensor.png?v=1-0)
designed for use in critical processes where it is desirable to have a second crystal in the vacuum chamber
- Dual crystals
- Cool Drawer crystal holder
- No internal cables
- Crystal shutter
![961-Cool-Drawer-Single-Sensor 961-Cool-Drawer-Single-Sensor](/uploads/media/323x215/01/961-Cool-Drawer-Single-Sensor.png?v=1-0)
allow crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation
- No internal cables
- Cool Drawer crystal holder
- Easy installation
- Bakeable if ordered with welded CF40 flange
![964-Crystal-12-Sesor 964-Crystal-12-Sesor](/uploads/media/323x215/04/964-Crystal-12-Sesor.png?v=1-0)
Replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller
- Holds 12 crystals with robust, automatic switching to maximize process up-time
- Easy-to-remove carousel allows fast replacement of all 12 crystals
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
- Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
![975-CrystalSix-Sensor 975-CrystalSix-Sensor](/uploads/media/323x215/05/975-CrystalSix-Sensor.png?v=1-0)
CrystalSix Sensor is critical for long processes demanding continuous rate control
- Holds 6 crystals with robust, automatic switching to maximize process uptime
- Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat-generating motors)
- 1/8" tubes maintain thermal stability and allow flexibility in sensor placement
- Optional crystal shutter available
![960-cygnus 960-cygnus](/uploads/media/323x215/00/960-cygnus.png?v=1-0)
Provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process
- INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Up to six sources can be controlled simultaneously, independently or in any combination by one Cygnus 2, relieving the need for two or three controllers
- USB data storage for screen shots, recipe storage, and data logging
![974-Easy-Rate-Dual-Sensor 974-Easy-Rate-Dual-Sensor](/uploads/media/323x215/04/974-Easy-Rate-Dual-Sensor.png?v=1-0)
simple and inexpensive solution for QCM applications where one crystal may not be enough
- Dual crystals
- Low in price, high in quality
- Front load crystal holder
- Includes crystal shutter
![959-Sensor-Feedthroughs 959-Sensor-Feedthroughs](/uploads/media/323x215/09/959-Sensor-Feedthroughs.png?v=2-0)
2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available, available with bored-through tube fittings
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available with bored-through tube fittings
![967-Easy-Rate-Single-Sensor 967-Easy-Rate-Single-Sensor](/uploads/media/323x215/07/967-Easy-Rate-Single-Sensor.png?v=1-0)
cost effective solution to high-accuracy thickness monitoring for short optical and batch coating processes
- Minimum investment with lowest upfront cost
- Lowest total cost of ownership from extended sensor life
- Maximum throughput with less maintenance
- Easy installation
![965-Front-Load-Dual-Sensor 965-Front-Load-Dual-Sensor](/uploads/media/323x215/05/965-Front-Load-Dual-Sensor.png?v=1-0)
proven reliability and durability
- Dual crystals
- Crystal shutter
- Front load crystal holder
- Easy installation
![976-Front-Load-Single-Sensor 976-Front-Load-Single-Sensor](/uploads/media/323x215/06/976-Front-Load-Single-Sensor.png?v=1-0)
Proven reliability and durability and the best thermal stability of any sensor head on the market.
- Front load crystal holder
- Easy installation
- Available with 2.54 cm (1 inch) bolt feedthrough / CF40 Feedthrough
- Adjustable length if ordererd with compression fittings
![956-Guardian 956-Guardian](/uploads/media/323x215/06/956-Guardian.png?v=1-0)
Simultaneous Control of Up to Eight Materials using Electron Impact Emission Spectroscopy
- Monitor and control simultaneous deposition of up to 8 materials
- Deposition rates from 0.1 to 10,000 Å/s
- Integrated EIES and QCM thin film process control
- 12 relay outputs and 12 digital inputs
![966-IC6 966-IC6](/uploads/media/323x215/06/966-IC6.png?v=1-0)
Provides exceptional value by combining the best performance, quality, and features of any other quartz crystal controller
- INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Codeposition of up to six sources simultaneously
- USB data storage for screen shots, recipe storage, and data logging
![973-IMM-100 973-IMM-100](/uploads/media/323x215/03/973-IMM-100.png?v=1-0)
Compact deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to compact size and minimize cost
- EtherCAT communications for seamless integration
![977-IMM-200 977-IMM-200](/uploads/media/323x215/07/977-IMM-200.png?v=1-0)
Compact deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to compact size and minimize cost
- Ethernet communications for seamless integration
![979-IQM-233 979-IQM-233](/uploads/media/323x215/09/979-IQM-233.png?v=1-0)
Low-Cost Deposition Control on a PCI Express Card
- PCI Express, install multiple cards in a PC
- Three sensor inputs, three control outputs per card
- Easy PLC integration to add I/O capabilities
- Codeposition of multiple sources
![1171-QCM-Sensor-Feedthroughs 1171-QCM-Sensor-Feedthroughs](/uploads/media/323x215/01/1171-QCM-Sensor-Feedthroughs.png?v=1-0)
Variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available Ultra-Torr O-ring compression fittings
- Custom feedthrough configurations available
- Other feedthrough styles available on request
![982-Quartz-Crystal-Group 982-Quartz-Crystal-Group](/uploads/media/323x215/02/982-Quartz-Crystal-Group.png?v=1-0)
100% Tested for Accuracy and Reliability and needed to monitor deposition rate in situ, collect accurate measurement data, optimize PVD applications, and to automate the process when coupled with a thin film controller.
- Increase profitability and maximize continuous process runs with increased production time
- Minimize cost of consumables with the highest quality crystals to ensure maximum crystal life
- Optimize inventory management with flexible delivery schedules and in stock products
- Maximize process performance and gain customized solutions with worldwide applications support
![958-RSH-600-Rotary-Sensor 958-RSH-600-Rotary-Sensor](/uploads/media/323x215/08/958-RSH-600-Rotary-Sensor.png?v=1-0)
designed for demanding processes, employing very thick films and several different materials
- Six crystals
- Position feedback (Controller dependent)
- Adjustable length (with optional flange)
- Rugged design
![970-SQC-310 970-SQC-310](/uploads/media/323x215/00/970-SQC-310.png?v=1-0)
Highly Accurate Sequential or Codeposition Control
- Bright, color LCD display - available in English or Chinese
- Standard RS-232 and USB (RS-232 and Ethernet optional)
- Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
- Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
![969-SQM-160 969-SQM-160](/uploads/media/323x215/09/969-SQM-160.png?v=1-0)
Multi-Film Rate / Thickness Monitor with averaged sensor control capability for large systems or assigned sensor inputs for different materials
- Two measurement channels standard, an additional four optional
- Analog outputs for rate/thickness recording
- High resolution option: 0.03Hz at 10 readings/sec
- RS-232 standard, USB or Ethernet optional
![981-STM-2 981-STM-2](/uploads/media/323x215/01/981-STM-2.png?v=1-0)
Combines the simplicity of USB connectivity with the accuracy of a precision measurement engine, all in a compact, inexpensive package
- Low cost deposition monitor
- USB connection
- Internal oscillator
- High accuracy at 10 measurements per second
![963-SemiQCM-CR-Sensor 963-SemiQCM-CR-Sensor](/uploads/media/323x215/03/963-SemiQCM-CR-Sensor.png?v=1-0)
Real-Time, in situ process monitoring, prevent over-etching, identify chamber clean end point
- Real-Time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
![955-TDMAT-Sensor 955-TDMAT-Sensor](/uploads/media/323x215/05/955-TDMAT-Sensor.png?v=1-0)
SemiQCM™ SR sensor is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).
- Real-Time, in situ process monitoring
- Prevent over-etching, identify chamber clean end point
- Identify equipment or process state fault
![957-Sputtering-Sensor 957-Sputtering-Sensor](/uploads/media/323x215/07/957-Sputtering-Sensor.png?v=1-0)
designed for use in any sputtering process
- Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
- Magnet to deflect free electrons away from the monitor crystal
- Easy installation with bendable water tubes allowing flexibility in sensor placement
- Rear load crystal insertion for easy crystal replacement
![978-UHV-Bakeable-Sensor 978-UHV-Bakeable-Sensor](/uploads/media/323x215/08/978-UHV-Bakeable-Sensor.png?v=1-0)
offer proven reliability and durability and have the best thermal stability of any sensor head on the market
- High temperature braze & welded construction
- Bakeout temperatures to 450° C
- Crystal shutter (option)
- Front load crystal holder
![972-XTC3M 972-XTC3M](/uploads/media/323x215/02/972-XTC3M.png?v=1-0)
Advanced, Affordable Rate Control for Single and Multiple Layer Processes
- Available in single-layer and multiple-layer models
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping
- Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources