Vacuum Feedthroughs & More
Linear Motion Feedthrough
![Linear-Motion-Feedthroughs-CF Linear-Motion-Feedthroughs-CF](/uploads/media/500x335/05/1105-Linear-Motion-Feedthroughs-CF.png?v=1-0)
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.
Advantages
- With bellows for more demanding vacuum requirements
- Direct push and pull actuation
- High accuracy adjustment using micrometer screw
- 2011/65/EU RoHS compliant
Specifications
FPU016-H
FPU040-H
FPU016-Z
FPU040-Z
Vacuum connection | DN16 ISO-CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M4x16 mm | |
Actuator | manual | |
Travel | mm | 25 |
Travel per revolution | mm | |
Scale division | mm | 5 |
Shaft load | ||
Radial force at max. | N | 20 |
Axial force vacuum | N | 85 |
Axial force against atm | N | 100 |
Torsion torque | Nm | 0.2 |
Tightness | mbar•l/s | 5 × 10-11 |
Pressure (absolute) | 1 × 10-10 mbar...2 bar | |
Bakeout temperature | ||
Feedthrough | °C | 300 |
Micrometer screw | °C | |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight
| kg | 0.15 |
Vacuum connection | DN40 ISO-CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M6x10 mm, Ø10 mm | |
Actuator | manual | |
Travel | mm | 50 |
Travel per revolution | mm | |
Scale division | mm | 10 |
Shaft load | ||
Radial force at max. | N | 100 |
Axial force vacuum | N | 140 |
Axial force against atm | N | 200 |
Torsion torque | Nm | 0.5 |
Tightness | mbar•l/s | 5 × 10-11 |
Pressure (absolute) | 1 × 10-10 mbar...2 bar | |
Bakeout temperature | ||
Feedthrough | °C | 300 |
Micrometer screw | °C | |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight
| kg | 0.75 |
Vacuum connection | DN16 ISO-CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M4x16 mm | |
Actuator | micrometer screw | |
Travel | mm | 20 |
Travel per revolution | mm | 0.5 |
Scale division | mm | 0.01 |
Shaft load | ||
Radial force at max. | N | 20 |
Axial force vacuum | N | 185 |
Axial force against atm | N | 200 |
Torsion torque | Nm | 0.2 |
Tightness | mbar•l/s | 5 × 10-11 |
Pressure (absolute) | 1 × 10-10 mbar...2 bar | |
Bakeout temperature | ||
Feedthrough | °C | 300 |
Micrometer screw | °C | 100 |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight
| kg | 0.25 |
Vacuum connection | DN40 ISO-CF-R | |
Feedthrough/seal | bellow | |
Shaft connection | M6x10mm, Ø10 mm | |
Actuator | micrometer screw | |
Travel | mm | 50 |
Travel per revolution | mm | 1 |
Scale division | mm | 0.005 |
Shaft load | ||
Radial force at max. | N | 100 |
Axial force vacuum | N | 440 |
Axial force against atm | N | 500 |
Torsion torque | Nm | 0.5 |
Tightness | mbar•l/s | 5 × 10-11 |
Pressure (absolute) | 1 × 10-10 mbar...2 bar | |
Bakeout temperature | ||
Feedthrough | °C | 300 |
Micrometer screw | °C | 100 |
Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
Weight
| kg | 1 |
Part Number
Part Number | Description |
214-330 | Linear Motion Feedthrough, FPU016-H, DN16 ISO-CF-R |
214-332 | Linear Motion Feedthrough, FPU040-H, DN40 ISO-CF-R |
214-334 | Linear Motion Feedthrough, FPU016-Z, DN16 ISO-CF-R |
214-336 | Linear Motion Feedthrough, FPU040-Z, DN40 ISO-CF-R |
Downloads
Datasheets
Lineardurchführungen CF DE
pdf
•
306,7 KB
•
German
•
Datasheets
Terminales de paso de movimiento lineal CF ES
pdf
•
306,2 KB
•
Spanish
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Datasheets
直線状モーションフィードスルー CF JA
pdf
•
403,6 KB
•
Japanese
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Datasheets
선형 동작 피드스루 CF KO
pdf
•
348,5 KB
•
Korean
•
Datasheets
直线运动馈入装置 CF ZH
pdf
•
398,6 KB
•
Chinese
•
Datasheets
Linear Motion Feedthroughs CF EN
pdf
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306,0 KB
•
English
•
Datasheets