1. Linear Motion Feedthrough
Vacuum Feedthroughs & More

Linear Motion Feedthrough

Linear-Motion-Feedthroughs-CF
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Product configurator

Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.

Advantages

  • With bellows for more demanding vacuum requirements
  • Direct push and pull actuation
  • High accuracy adjustment using micrometer screw
  • 2011/65/EU RoHS compliant

Specifications

FPU016-H
FPU040-H
FPU016-Z
FPU040-Z
Vacuum connection DN16 ISO-CF-R
Feedthrough/seal bellow
Shaft connection M4x16 mm
Actuator manual
Travelmm25
Travel per revolutionmm 
Scale divisionmm5
Shaft load
Radial force at max.N20
Axial force vacuumN85
Axial force against atmN100
Torsion torqueNm0.2
Tightnessmbar•l/s5 × 10-11
Pressure (absolute) 1 × 10-10 mbar...2 bar
Bakeout temperature  
Feedthrough°C300
Micrometer screw°C 
Materials exposed 
to process media		 stainless steel 304L/1.4306, 
stainless steel 316Ti/1.4571

Weight

 

kg0.15
Vacuum connection DN40 ISO-CF-R
Feedthrough/seal bellow
Shaft connection M6x10 mm, Ø10 mm
Actuator manual
Travelmm50
Travel per revolutionmm 
Scale divisionmm10
Shaft load
Radial force at max.N100
Axial force vacuumN140
Axial force against atmN200
Torsion torqueNm0.5
Tightnessmbar•l/s5 × 10-11
Pressure (absolute) 1 × 10-10 mbar...2 bar
Bakeout temperature  
Feedthrough°C300
Micrometer screw°C 
Materials exposed 
to process media		 stainless steel 304L/1.4306, 
stainless steel 316Ti/1.4571

Weight

 

kg0.75
Vacuum connection DN16 ISO-CF-R
Feedthrough/seal bellow
Shaft connection M4x16 mm
Actuator micrometer screw
Travelmm20
Travel per revolutionmm0.5
Scale divisionmm0.01
Shaft load
Radial force at max.N20
Axial force vacuumN185
Axial force against atmN200
Torsion torqueNm0.2
Tightnessmbar•l/s5 × 10-11
Pressure (absolute) 1 × 10-10 mbar...2 bar
Bakeout temperature  
Feedthrough°C300
Micrometer screw°C100
Materials exposed 
to process media		 stainless steel 304L/1.4306, 
stainless steel 316Ti/1.4571

Weight

 

kg0.25
Vacuum connection DN40 ISO-CF-R
Feedthrough/seal bellow
Shaft connection M6x10mm, Ø10 mm
Actuator micrometer screw
Travelmm50
Travel per revolutionmm1
Scale divisionmm0.005
Shaft load
Radial force at max.N100
Axial force vacuumN440
Axial force against atmN500
Torsion torqueNm0.5
Tightnessmbar•l/s5 × 10-11
Pressure (absolute) 1 × 10-10 mbar...2 bar
Bakeout temperature  
Feedthrough°C300
Micrometer screw°C100
Materials exposed 
to process media		 stainless steel 304L/1.4306, 
stainless steel 316Ti/1.4571

Weight

 

kg1
Download full specifications

Part Number

Part NumberDescription
214-330Linear Motion Feedthrough, FPU016-H, DN16 ISO-CF-R
214-332Linear Motion Feedthrough, FPU040-H, DN40 ISO-CF-R
214-334Linear Motion Feedthrough, FPU016-Z, DN16 ISO-CF-R
214-336Linear Motion Feedthrough, FPU040-Z, DN40 ISO-CF-R
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