Vacuum Feedthroughs & More
Rotary Feedthrough
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.
Advantages
- Bellow sealed
- All-metal version
- For very demanding vacuum requirements
- 2011/65/EU RoHS compliant
Specifications
FRU016-H
FRU040-N
FRU040-L
| Vacuum connection | DN16 ISO-CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 4 |
| Transferable torque | ||
| Dynamic | Nm | 0.4 |
| Dynamic, at 300 °C | Nm | 0.2 |
| Static | Nm | 0.2 |
| Rotational speed | RPM | 200 |
| At max. torque | RPM | |
| Shaft load vacuum sided | ||
| Radial force | N | 10 |
| Axial force | N | 5 |
| Service life | Revolutions | 1'000'000 |
| Scale division | degree | 10 |
| Tightness | mbar•l/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Operating temperature | °C | 300 |
| Bakeout temperature | °C | 300 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, –/2.4360 | |
Weight
| kg | 0.3 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 8 |
| Transferable torque | ||
| Dynamic | Nm | 4 |
| Dynamic, at 300 °C | Nm | 2 |
| Static | Nm | 3 |
| Rotational speed | RPM | 1000 |
| At max. torque | RPM | 500 |
| Shaft load vacuum sided | ||
| Radial force | N | 60 |
| Axial force | N | 25 |
| Service life | Revolutions | 2'000'000 |
| Scale division | degree | 10 |
| Tightness | mbar•l/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Operating temperature | °C | 300 |
| Bakeout temperature | °C | 300 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301 | |
Weight
| kg | 1.5 |
| Vacuum connection | DN 40 CF-F | |
| Feedthrough/seal | bellow | |
| Shaft connection | mm | 12 |
| Transferable torque | ||
| Dynamic | Nm | 10 |
| Dynamic, at 300 °C | Nm | 2 |
| Static | Nm | 3 |
| Rotational speed | RPM | 500 |
| At max. torque | RPM | 300 |
| Shaft load vacuum sided | ||
| Radial force | N | 100 |
| Axial force | N | 30 |
| Service life | Revolutions | 1'000'000 |
| Scale division | degree | 10 |
| Tightness | mbar•l/s | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | |
| Operating temperature | °C | 300 |
| Bakeout temperature | °C | 300 |
| Materials exposed to process media | 304L/1.4306, 304/1.4301, 303/1.4305 | |
Weight
| kg | 3.0 |
Part Number
| Part Number | Description |
| 214-310 | Rotary feedthrough, FRU016-H, DN16 ISO-CF-F |
| 214-312 | Rotary feedthrough, FRU016-H, DN40 ISO-CF-F |
| 214-314 | Rotary feedthrough, FRU040-L, DN40 ISO-CF-F |
Downloads
Datasheets
Drehdurchführungen CF DE
pdf
•
310,1 KB
•
German
•
Datasheets
Terminales de paso de giro CF ES
pdf
•
310,0 KB
•
Spanish
•
Datasheets
回転式フィードスルー CF JA
pdf
•
411,1 KB
•
Japanese
•
Datasheets
로터리 피드스루 CF KO
pdf
•
350,1 KB
•
Korean
•
Datasheets
旋转馈入装置 CF ZH
pdf
•
395,3 KB
•
Chinese
•
Datasheets
Rotary Feedthroughs CF EN
pdf
•
309,5 KB
•
English
•
Datasheets
