Vacuum Feedthroughs & More
Rotary/Linear Motion Feedthrough
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Product configurator
Gemini™ MxG5xx
Type
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Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
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INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF/ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbar•l/s. For UHV an all metal designed feedthrough is also available.
Advantages
- Two FPM shaft seals
- Direct push/pull and rotary actuation
- With locking ring and optional anti-rotation device
- 2011/65/EU RoHS compliant
Specifications
FCH016-H
FCH025-H
FCH040-H
| Vacuum connection | DN16 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M3/Ø5mm | |
| Travel | mm | 50 |
| Shaft load | ||
| Radial force at max. travel | N | 10 |
| Torsion torque | Nm | 2 |
| Tightness, static | mbar•l/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar...1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
Weight
| kg | 0.1 |
| Vacuum connection | DN25 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M4/Ø8mm | |
| Travel | mm | 100 |
| Shaft load | ||
| Radial force at max. travel | N | 15 |
| Torsion torque | Nm | 8 |
| Tightness, static | mbar•l/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar...1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
Weight
| kg | 0.2 |
| Vacuum connection | DN40 ISO-KF | |
| Feedthrough/seal | FPM | |
| Shaft connection | M6/Ø12mm | |
| Travel | mm | 150 |
| Shaft load | ||
| Radial force at max. travel | N | 30 |
| Torsion torque | Nm | 20 |
| Tightness, static | mbar•l/s | 1 x 10-9 |
| Pressure (absolute) | 1 x 10-8 mbar...1bar | |
| Operating temperature | °C | 50 |
| Bakeout temperature | °C | 110 |
| Materials exposed to process media | stainless steel 304/1.4301, aluminum 6082 | |
Weight
| kg | 0.3 |
Part Number
| Part Number | Description |
| FCH016-H | |
| 214-320 | Rotary/linear feedthrough, DN16 ISO-KF |
| 214-072 | Anti-rotation device, DN16 ISO-KF |
| FCH025-H | |
| 214-322 | Rotary/linear feedthrough, DN25 ISO-KF |
| 214-073 | Anti-rotation device, DN25 ISO-KF |
| FCH040-H | |
| 214-324 | Rotary/linear feedthrough, DN40 ISO-KF |
| 214-074 | Anti-rotation device, DN40 ISO-KF |
Downloads
Datasheets
Dreh-/Schiebedurchführungen ISO-KF DE
pdf
•
275,0 KB
•
German
•
Datasheets
Terminales de paso de movimiento lineal/giratorio ISO-KF ES
pdf
•
274,2 KB
•
Spanish
•
Datasheets
回転式/直線状モーションフィードスルー ISO-KF JA
pdf
•
367,1 KB
•
Japanese
•
Datasheets
로터리/선형 동작 피드스루 ISO-KF KO
pdf
•
315,5 KB
•
Korean
•
Datasheets
旋转/直线运动馈入装置 ISO-KF ZH
pdf
•
362,6 KB
•
Chinese
•
Datasheets
Rotary/Linear Motion Feedthroughs ISO-KF EN
pdf
•
274,3 KB
•
English
•
Datasheets
3D Files
FCH016-H anti-rotation device
zip
•
36,4 KB
•
3D Files
FCH016-H feedthrough
zip
•
50,0 KB
•
3D Files
FCH025-H anti-rotation device
zip
•
33,4 KB
•
3D Files
FCH025-H feedthrough
zip
•
51,5 KB
•
3D Files
FCH040-H anti-rotation device
zip
•
36,7 KB
•
3D Files
FCH040-H feedthrough
zip
•
54,6 KB
•
3D Files
