1. BAG402
Hot Ionization Gauges

BAG402

Medium to Ultra High Vacuum Gauge

Pirani-BAG402-BPG400-BPG402
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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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More Flexibility. Better Stability.

Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable), now also compatible with VGC50x and more.
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The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. 

The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.

Advantages

  • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Overpressure detection protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Automatic emission current selection reduces control complexity
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

Specifications

Measurement range (air, O2, CO, N2)mbar
Torr		5×10-10 … 2.7×10-2
3.75×10-10 5×10-2
   
Accuracy   
10-8 … 10-2 mbar% of reading±15
   
Temperature  
Operation (ambient)°C0 … +50
Storage°C-20 … +70
Bakeout at flange without electronics °C80
   
Supply voltageV (dc)
A (dc)		+20 … +28
≤0.8
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Part Number

Part Number
Accessories
Spare Parts
353-600BAG402 DSUB9 KF25
353-601BAG402 DSUB9 CF40
303-333Diagnostic cable 1.9m (P3)
354-484Spare sensor head BAG402 DN 25 ISO-KF
354-485Spare sensor head BAG402 DN 40 CF-R
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