Hot Ionization Gauges
BAG402
Medium to Ultra High Vacuum Gauge
Drop-in Options
Revolutionize your vacuum gauge experience with us!
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
More Flexibility. Better Stability.
Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable), now also compatible with VGC50x and more.
Upgrade now
The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package.
The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.
Advantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
| Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 2.7×10-2 3.75×10-10 5×10-2 |
| Accuracy | ||
| 10-8 … 10-2 mbar | % of reading | ±15 |
| Temperature | ||
| Operation (ambient) | °C | 0 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange without electronics | °C | 80 |
| Supply voltage | V (dc) A (dc) | +20 … +28 ≤0.8 |
Part Number
Part Number
Accessories
Spare Parts
| 353-600 | BAG402 DSUB9 KF25 |
| 353-601 | BAG402 DSUB9 CF40 |
| 303-333 | Diagnostic cable 1.9m (P3) |
| 354-484 | Spare sensor head BAG402 DN 25 ISO-KF |
| 354-485 | Spare sensor head BAG402 DN 40 CF-R |
Downloads
Datasheets
BAG402 Datasheet
pdf
•
125,8 KB
•
English
•
Datasheets
BAG402 Datenblatt
pdf
•
345,1 KB
•
German
•
Datasheets
BAG402 Ficha de datos
pdf
•
444,8 KB
•
Spanish
•
Datasheets
BAG402 データシート
pdf
•
521,2 KB
•
Japanese
•
Datasheets
BAG402 数据表
pdf
•
506,2 KB
•
Chinese
•
Datasheets
BAG402 데이터시트
pdf
•
440,4 KB
•
Korean
•
Datasheets
Manual
The product is used in the following markets
