Hot Ionization Gauges
BPG400
ATM to Ultra High Vacuum Gauge

Drop-in Options
Revolutionize your vacuum gauge experience with us!
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).
Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
Advantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Specifications
Measurement range (air, O2, CO, N2) | mbar Torr | 5×10-10 … 1000 3.8×10-10 … 750 |
Accuracy | ||
10-8 … 10-2 mbar | % of reading | ±15 |
Repeatability | ||
10-8 … 10-2 mbar | % of reading | 5 |
Temperature | ||
Operation (ambient) | °C | 0 … +50 |
Storage | °C | -20 … +70 |
Bakeout at flange with extension | °C | 150 |
Bakeout at flange without extension | °C | 80 |
Bakeout electronics removed | °C | 150 |
Supply voltage | V (dc) A (dc) | +20 … +28 0.8 |
Materials exposed to vacuum | Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
Part Number
Part Number
Accessories
Spare Parts
Part Number | Description |
353-500 | BPG400 DN 25 ISO-KF |
353-501 | BPG400 LCD, DN 25 ISO-KF |
353-502 | BPG400 DN 40 CF-R |
353-503 | BPG400 LCD, DN 40 CF-R |
353-505 | BPG400-SP PBus, DN 25 ISO-KF |
353-506 | BPG400-SP PBus, DN 40 CF-R |
353-507 | BPG400-SD DNet, DN 25 ISO-KF |
353-508 | BPG400-SD DNet, DN 40 CF-R |
Part Number | Description |
353-511 | Power supply BPG400 24VDC |
353-510 | 100 mm sensor extension tube |
353-512 | Baffle for BPG400 |
211-113 | Centering ring with baffle DN 25 KF |
Part Number | Description |
354-490 | Spare sensor head BPG400, DN 25 ISO-KF |
354-491 | Spare sensor head BPG400, DN 40 CF-R |
Downloads
Datasheet
BPG400 Datasheet
pdf
•
169,8 KB
•
English
•
Datasheets
BPG400 Datenblatt
pdf
•
229,4 KB
•
German
•
Datasheets
BPG400 Ficha de datos
pdf
•
229,9 KB
•
Spanish
•
Datasheets
BPG400 データシート
pdf
•
359,9 KB
•
Japanese
•
Datasheets
BPG400 数据表
pdf
•
357,6 KB
•
Chinese
•
Datasheets
BPG400 데이터시트
pdf
•
280,7 KB
•
Korean
•
Datasheets
Manuals
BPG400-xx Gebrauchsanleitung
pdf
•
1,1 MB
•
German
•
Operating Manual
BPG400-xx Operating Manual
pdf
•
1,1 MB
•
English
•
Operating Manual
BPG400x DeviceNet Communication Protocol
pdf
•
319,3 KB
•
English
•
Operating Manual
BPG400x PROFIBUS Communication Protocol
pdf
•
399,9 KB
•
English
•
Operating Manual
BPG400xx Gebrauchsanleitung (Kurzanleitung)
pdf
•
319,1 KB
•
German
•
Operating Manual
BPG400xx Gebrauchsanleitung (Kurzanleitung)
pdf
•
319,1 KB
•
English
•
Operating Manual
BPG400xx Operating Manual (short version)
pdf
•
314,5 KB
•
English
•
Operating Manual
BPG400xx with Fieldbus Interface Operating Manual
pdf
•
326,7 KB
•
English
•
Operating Manual
3D Step Files
BPG400 Replacement Sensor 3D DN25 ISO-KF
zip
•
48,5 KB
•
3D Files
BPG400 Replacement Sensor 3D DN40 CF-R
zip
•
69,2 KB
•
3D Files
BPG400 with LCD 3D DN25 ISO-KF
zip
•
456,8 KB
•
3D Files
BPG400 with LCD 3D DN40 CF-R
zip
•
468,1 KB
•
3D Files
BPG400 without LCD 3D DN 25 ISO-KF
zip
•
449,5 KB
•
3D Files
BPG400 without LCD 3D DN40 CF-R
zip
•
427,5 KB
•
3D Files
BPG400-SD with DeviceNet™ 3D DN25 ISO-KF
zip
•
457,3 KB
•
3D Files
BPG400-SD with DeviceNet™ 3D DN40 CF-R
zip
•
462,3 KB
•
3D Files
BPG400-SP with PROFIBUS DP 3D DN25 ISO-KF
zip
•
468,2 KB
•
3D Files
BPG400-SP with PROFIBUS DP 3D DN40 CF-R
zip
•
468,2 KB
•
3D Files
The product is used in the following markets