Cold Cathode Gauges

Optical Gas Analyzers

Augent® OPG550

High speed chamber leak test - gas analysis

Augent® OPG550

High speed leak detection allows chamber leak test
Smart algorithm for easy integration
Long life time, no filament burns, air inrush protection
Withstand process chemistry

Cold Cathode Gauges

Gemini™ MxG5xx

Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. Measurement range from 1x10^-9 mbar to atmosphere.

Gemini™ MxG5xx

Long lifetime in harsh environments
Low magnetic stray field
Reliable fast ignition
Fastest maintenance - replaceable insert

Cold Cathode Gauges

MAG470

Inverted Magnetron Vacuum Gauge is for all ultra high vacuum applications, measurement range from 5x10^-11 mbar

MAG470

Measurement range down to 5x10^-11 mbar
Extended version, sensor bakeout up to 250°C
Excellent ignition properties
Easy to clean

Cold Cathode Gauges

MPG40X

Inverted Magnetron Pirani Gauges, measure from 5 x 10^-9mbar to atmosphere

MPG40X

Combination gauge – Inverted Magnetron & Pirani
Wide measurement range from 5 x 10^-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties

Cold Cathode Gauges

MAG050, MAG060, MAG070

Cold cathode passive gauge heads for VGC094 and VGC083C

MAG050, MAG060, MAG070

Reliable and proven gauge head design, based on the inverted magnetron principle
Large vacuum pressure measurement range capability from 1×10^-11 (MAG070) to 5×10^-3 mbar
Bakeable to 150 °C (MAG050) or 250 °C (MAG060, MAG070)
Good ignition properties

Cold Cathode Gauges

MAG084

The gauge head MAG084 is a unique magnetic field resistant inverted magnetron cold cathode gauge designed to operate with the Vacuum Gauge Controller VGC094.

MAG084

Developed to sustain operation in strong external magnetic fields
Reliable and proven gauge head design, based on the inverted magnetron principle
Innovative double ionization chamber principle
Bakeable to 230 °C