Edge® CDG100D2
100°C temperature controlled, full scale 1 … 1000 Torr / mbar
Revolutionize your vacuum gauge experience with us!
Product configurator
Gemini™ MxG5xx
INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface.
The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind.
Advantages
- Compact, saves valuable tool space
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Two year warranty, longer life time with advanced heating concept and gauge protection
- No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- CVD, Etch, PVD and other semiconductor production processes
Specifications
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) | |
| Accuracy | % of reading | 0.2 |
| Resolution | percent FS | 0.003 |
| Output signal (analog) | V (dc) | 0 … +10 |
| Response time | ms | 30 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L) | |
Part Number
