Hot Ionization Gauges

HPG400

ATM to High Vacuum Gauge

Drop-in Options

Revolutionize your vacuum gauge experience with us!

The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines High Pressure Hot Ionization and Pirani sensors in a single, compact, economical package to measure pressure from 2×10^-6 mbar to atmosphere (1.5×10^-6 Torr to atmosphere).

The HPG400 provides highly repeatable and reproducible pressure measurement for accurate sputter process pressure control.

Advantages

HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10^-5 … 1 mbar for improved process control
User selectable hot ion emission activation between 5×10^-2 and 1 mbar
Pirani interlock protects the hot filament from premature burnout
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
RoHS compliance

Typical applications

Sputter applications in semiconductor manufacturing, electronics and media industry
Industrial coating
General vacuum measurement and control in the low to high vacuum range

Specifications

Measurement range (air, N₂)	mbar Torr	2×10^-6 … 1000 1.5×10^-6 … 750

Accuracy

10^-5 … 1 mbar	% of reading	±15 ⁽¹⁾

Repeatability

10^-5 … 10^-1 mbar	% of reading	2
10^-1 … 100 mbar	% of reading	30

Temperature

Operation (ambient)	°C	0 … +50
Storage	°C	-20 … +70
Bakeout at flange	°C	80
Bakeout electronics removed	°C	150

Supply voltage	V (dc) A (dc)	20 … 28 0.8

Materials exposed to vacuum		Yt₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

(1) Accuracy from 10^-5 mbar to the selected hot ion emission on value

Download full specifications

Part Number

Accessories

Spare Parts

Part Number	Description
353-520	HPG400 DN 25 ISO-KF
353-521	HPG400 LCD, DN 25 ISO-KF
353-522	HPG400 DN 40 CF-F
353-523	HPG400 LCD, DN 40 CF-F
353-525	HPG400-SP PBus, DN 25 ISO-KF
353-526	HPG400-SP PBus, DN 40 CF-F
353-527	HPG400-SD DNet DN 25 ISO-KF
353-528	HPG400-SD DNet DN 40 CF-F

Part Number	Description
211-113	Centering ring with baffle DN 25 KF
353-511	Power supply BPG400 24VDC
357-499	Baffle HPG (10 pieces)

Part Number	Description
354-487	Spare sensor head HPG400, DN 25 ISO-KF
354-488	Spare sensor head HPG400, DN 40 CF-F

Downloads

Brochure

Hot Ion Gauge Brochure

pdf • 2,5 MB • English • Brochures

Datasheet

HPG400 Datasheet

pdf • 171,6 KB • English • Datasheets

HPG400 Datenblatt

pdf • 283,4 KB • German • Datasheets

HPG400 Ficha de datos

pdf • 283,7 KB • Spanish • Datasheets

HPG400 データシート

pdf • 409,6 KB • Japanese • Datasheets

HPG400 数据表

pdf • 411,9 KB • Chinese • Datasheets

HPG400 데이터시트

pdf • 333,6 KB • Korean • Datasheets

Manuals

TIMA31E1_Operating manual_short

pdf • 307,4 KB • English • Operating Manual

TIMA32E1_Operating manual for SD_SP_short

pdf • 417,4 KB • English • Operating Manual

TINA31E1_Operating manual_long

pdf • 1,1 MB • English • Operating Manual

TIRA03E1_Communication Protocol for DeviceNet

pdf • 323,7 KB • English • Operating Manual

TIRA36E1_Communication Protocol for ProfiBus

pdf • 404,8 KB • English • Operating Manual

3D Step Files

353-526 HPG with PROFIBUS DP

zip • 470,4 KB • 3D Files

354-487 HPG Replacment Sensor 25 ISO-KF

zip • 31,1 KB • 3D Files

354-488 HPG Replacment Sensor 25 ISO-KF

zip • 45,4 KB • 3D Files

HPG400 with LCD 3D

zip • 459,2 KB • 3D Files

HPG400 without LCD 3D

zip • 445,3 KB • 3D Files

HPG400 without LCD 3D

zip • 462,0 KB • 3D Files

HPG400 without LCD 3D

zip • 452,1 KB • 3D Files

HPG400-SD with DeviceNet 3D

zip • 461,2 KB • 3D Files

HPG400-SD with DeviceNet 3D

zip • 464,5 KB • 3D Files

HPG400-SP with PROFIBUS 3D

zip • 467,4 KB • 3D Files

Others

HPG400 06A8 DPV1 GSD

GSD • 3,6 KB • English

HPG400 Float EDS

eds • 33,6 KB • English

HPG400 int EDS

eds • 33,5 KB • English

The product is used in the following markets

Analytical Instrumentation

Supports with their highly sophisticated tools users in a broad filed of applications and markets.

Learn more

Battery

From electrode production to end-of-line testing

Learn more

Display

INFICON supports leading-edge technology and enables the highest quality Display products

Learn more

Energy

Oil and gas production has seen an increase in demand over the last decades and is being propelled by population growth, urbanization, and the consumer middle class in developing countries.

Learn more

Industrial Manufacturing

Vacuum is used more often to guarantee clean environment and is needed for several processes, then without vacuum they do not work.

Learn more

Mobility & Automotive

Reliable leak testing in an evolving industry. Changes in the automotive industry make leak testing even more important.

Learn more

Pharma & Medical

Increasing Productivity and helping meet Compliance standards and Quality requirements in Pharma

Learn more

Research & Academia

Unveiling the innermost mysteries of the universe through fundamental research. Delivering the innovation today that empowers the technologies of your tomorrow.

Learn more

Semiconductor IDM & Foundry

Sensors tailored to support a wide range of applications, ensuring product safety, increased yield and maximum productivity

Learn more

Vacuum Coating

The vacuum coating markets go well beyond optics and are rapidly expanding into arenas, industries and film layers that were almost unimaginable just ten years ago.

Learn more

Advantages

Typical applications

Specifications

Part Number

Downloads

Related Products