IE414, IE514
Hot cathode ionization passive gauge heads for IM540
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Gemini™ MxG5xx
The IE414 and IE514 are high-end vacuum sensors based on hot cathode ionization effect. IE414 is a Bayard-Alpert gauge while the IE514 is based on the extractor principle. These passive gauges are combined and controlled by the IM540 vacuum gauge controller.
Thanks to the modulation of the cathode emission current, the IE414 measurement range spans over 9 decades from 10-2 mbar down to 10-11 mbar. The extractor principle allows IE514 reaching a lower measurement limit of 2×10-12 mbar thanks to its intrinsic reduction of X-ray and ion desorption effects. The IE414 and IE514 gauge heads are designed for low outgassing vacuum systems and can be baked up to extreme high temperature (400 °C). The temperature resistant gauge head cable set is also designed for high bake-out temperature, exceeding 200 °C (250 °C at the flange of the sensor).
Advantages
- High accuracy of the measurements due to individually calibrated sensing system
- Exchangeable cathode
- Extreme high temperature bake-out up to 400 °C
IE414
- Bayard-Alpert sensing principle
- Measurement range to 2×10-11 mbar
- Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)
IE514
- Extractor sensing principle
- Lowest measurement limit, down to 2×10-12 mbar
- Significant reduction of X-ray and ion desorption effects
Typical applications
- Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out
Operating Units
- Vacuum Gauge Controller IM540
Specifications
| Measurement principle | Bayard-Alpert, hot cathode ionization |
| Measurement range | 2×10-11 ... 1×10-2 mbar (with modular emission current) |
| X-ray limit | <10-11 mbar |
| Feedthrough | Al2O3 ceramic |
| Bake-out temperature | ≤400 °C |
| Material exposed to vacuum | NiFe, AI2O3, stainless steel, Y2O3, Mo, tungsten |
| Features | Iridium filament, coated with Y2O3 Molybdenum anode |
| Measurement principle | Extractor, hot cathode ionization |
| Measurement range | 2×10-12 ... 1×10-4 mbar |
| X-ray limit | <10-12 mbar |
| Feedthrough | Al2O3 ceramic |
| Bake-out temperature | ≤400 °C |
| Material exposed to vacuum | NiFe, AI2O3, stainless steel, Y2O3, tungsten |
| Features | Iridium filament, coated with Y2O3 Stainless steel anode |
Part Number
| IE414 | |
| 399-661 | IE414 DN 40 CF-F |
| 399-676 | Replacement cathode IE414 |
| IE514 | |
| 399-663 | IE514 DN 40 CF-F |
| 399-677 | Replacement cathode IE514 |
| Gauge head cables to IM540 to IE414/514, 80 °C | |
| 399-680 | 3 m |
| 399-681 | 5 m |
| 399-682 | 10 m |
| 399-685 | 50 m |
| Gauge head cables to IM540 to IE414/514, 200 °C | |
| 399-686 | 3 m |
| 399-687 | 5 m |
| 399-688 | 10 m |
| 399-690 | 50 m |
