Cold Cathode Gauges
MAG470
Inverted Magnetron Gauges
Drop-in Options
Revolutionize your vacuum gauge experience with us!
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
The Inverted Magnetron Vacuum Gauge MAG470 is for all ultra high vacuum applications. The measurement range is from 5x10-11 mbar to 1x10-2 mbar.
Advantages
- No filament to burn out
- Extended version, sensor bakeout up to 250°C
- Excellent ignition properties
- Easy to clean
- Metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- Ultra high vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Specifications
MAG470
MAG470 extended
| Measurement range (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| Accuracy | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| Repeatability | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| Temperature | ||
| Operation (ambient) | °C | +5 ... +55 |
| Storage | °C | -40 ... +65 |
| Bake-out | °C | 250 1) |
| Supply voltage | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | |
| (1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable | ||
| Measurement range (air, N2) | mbar Torr | 5x10-11 … 1x10-2 3.8x10-11 … 7.5x10-3 |
| Accuracy | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±30 |
| Repeatability | ||
| 1x10-9 ... 1x10-3 mbar | % of reading | ≈±5 |
| Temperature | ||
| Operation (ambient) | °C | +5 ... +55 |
| Storage | °C | -40 ... +65 |
| Bake-out | °C | 250 2) |
| Supply voltage | ||
| At gauge | V (dc) | +15 ... +30 |
| At supply unit with max. cable length (3) | V (dc) | +16 ... +30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤2 |
| Materials exposed to vacuum | Stainless steel, Al2O3, Ag | |
| (1) Without electronics magnetic shielding (2) 250°C in defined area, see dimension (3) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable | ||
Part Number
Part Number
Accessories
Spare Parts
| MAG470 | |
| Part Number | Description |
| 399-360 | MAG470 DN 40 CF-F, FCC |
| MAG470 extended | |
| Part Number | Description |
| 399-361 | MAG470 DN 40 CF-F, extendet |
| MAG470 | |
| Part Number | Description |
| 351-023 | Magnetic shield |
| MAG470 extended | |
| Part Number | Description |
| 351-023 | Magnetic shield |
| MAG470 | |
| Part Number | Description |
| 351-997 | MPG401 Maintenance set |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| MAG470 extended | |
| Part Number | Description |
| 351-990 | Repair set IKR 060/070/26x/270 MAG470 |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| 351-994 | MPG40x Ignition tool set |
| 351-997 | MPG401 Maintenance set |
The product is used in the following markets
