INFICON SKY® CDG045D

INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control.

CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding vacuum applications.

Also available with PROFINET® digital interface and with current loop 4 … 20 mA!

Advantages

Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with advanced heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, CVD, PVD and other semiconductor production processes
Chemical and corrosive vacuum processes
General thin film and vacuum processes
Reference sensor for monitoring of test instruments according to international standards
Transfer standard for traceability measurements

Specifications

1000 Torr, 1100 mbar

500 ... 1 Torr / mbar

0.5 ... 0.05 Torr / mbar

Accuracy	% of reading	0.15

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.15

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.15

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	130 / 30 ⁽³⁾

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

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Advantages

Typical applications

Specifications

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