Capacitance Manometers

SKY® CDG160D

160°C temperature controlled, full scale 1 … 1000 Torr / mbar

Drop-in Options

Revolutionize your vacuum gauge experience with us!

INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control.

CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof.

The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

Also available with EtherCAT digital interface!

Advantages

Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical applications

Etch, CVD, PVD and other semiconductor production processes
Chemical and corrosive high temperature processes
General thin film and vacuum processes requiring gauge protection

Specifications

1000 ... 500 Torr / mbar

200 ... 1 Torr / mbar

Accuracy	% of reading	0.4

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Accuracy	% of reading	0.4

Resolution	percent FS	0.003

Output signal (analog)	V (dc)	0 … +10

Response time	ms	30

Materials exposed to vacuum		Aluminum oxide ceramic (AI₂O₃), stainless steel (AISI 316L)

Download full specifications

Part Number

CDG160_200D Ordering information

CDG160_200D Ordering information

Downloads

Brochures

SKY® CDG100-200D Brochure

pdf • 2,5 MB • English • Brochures

Vacuum Instrumentation with EtherCAT Brochure

pdf • 3,3 MB • English • Brochures

Datasheets

SKY® CDG160D CDG200D Datasheet

pdf • 739,2 KB • English • Datasheets

SKY® CDG160D Datenblatt

pdf • 864,4 KB • German • Datasheets

SKY® CDG160D Ficha de datos

pdf • 906,4 KB • Spanish • Datasheets

SKY® CDG160D データシート

pdf • 1,0 MB • Japanese • Datasheets

SKY® CDG160D 数据表

pdf • 539,6 KB • Chinese • Datasheets

SKY® CDG160D 데이터시트

pdf • 909,4 KB • Korean • Datasheets

Dimension Drawings

SKY® CDG160D CDG200D Dimensions

jpg • 586,2 KB • German, Japanese, Korean, Spanish, Chinese, English • Dimension Drawings

Manuals

CDG EtherCAT New Generation Communication Protocol

pdf • 2,1 MB • English • Operating Manual

CDGxxxD Communication manual RS232C

pdf • 187,4 KB • English • Operating Manual

CDGxxxD Kommunikationsanleitung RS232C

pdf • 188,5 KB • German • Operating Manual

Communication protocol EtherCAT

pdf • 972,1 KB • English • Operating Manual

Communication protocol PROFIBUS

pdf • 592,8 KB • English • Operating Manual

SKY® CDG045D-200D DeviceNet Communication Protocol

pdf • 474,8 KB • English • Operating Manual

SKY® CDG160D CDG200D Gebrauchsanleitung

pdf • 1,3 MB • German • Operating Manual

SKY® CDG160D, CDG200D Current Loop Gebrauchsanleitung

pdf • 1,1 MB • German • Operating Manual

SKY® CDG160D, CDG200D Current Loop Operating Manual

pdf • 1,1 MB • English • Operating Manual

SKY® CDG160D, CDG200D Operating Manual

pdf • 1,3 MB • English • Operating Manual

SKY® CDG160D, CDG200D 数据表

pdf • 1,4 MB • Chinese • Operating Manual

3D Step Files

SKY® CDG160D 3D 16CF 9DSUB

zip • 542,8 KB • 3D Files

SKY® CDG160D 3D 16CF E-CAT

zip • 250,3 KB • 3D Files

SKY® CDG160D 3D 16KF 9DSUB

zip • 536,8 KB • 3D Files

SKY® CDG160D 3D 16KF E-CAT

zip • 242,6 KB • 3D Files

SKY® CDG160D 3D 16KF P-NET

zip • 293,1 KB • 3D Files

SKY® CDG160D 3D 4-VCR-f 9DSUB

zip • 543,2 KB • 3D Files

SKY® CDG160D 3D 4-VCR-f E-CAT

zip • 768,0 KB • 3D Files

SKY® CDG160D 3D 4-VCR-f P-BUS

zip • 820,0 KB • 3D Files

SKY® CDG160D 3D 4-VCR-f P-NET

zip • 354,3 KB • 3D Files

SKY® CDG160D 3D 4-VCR-m 9DSUB

zip • 565,8 KB • 3D Files

SKY® CDG160D 3D 4-VCR-m D-NET

zip • 869,0 KB • 3D Files

SKY® CDG160D 3D 4-VCR-m E-CAT

zip • 954,3 KB • 3D Files

SKY® CDG160D 3D 4-VCR-m P-BUS

zip • 839,7 KB • 3D Files

SKY® CDG160D 3D 4-VCR-m P-NET

zip • 385,9 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f 9DSUB

zip • 374,9 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f Long 9DSUB

zip • 544,7 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f Long D-NET

zip • 853,0 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f Long E-CAT

zip • 934,4 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f Long P-BUS

zip • 821,9 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f Long P-NET

zip • 366,1 KB • 3D Files

SKY® CDG160D 3D 8-VCR-f P-NET

zip • 296,1 KB • 3D Files

SKY® CDG160D 3D Tube E-CAT

zip • 239,9 KB • 3D Files

SKY® CDG160D 3D Tube P-NET

zip • 287,2 KB • 3D Files

Others

CDG EtherCAT ESI file V1_4_0_0

xml • 1,3 MB • English

CDG EtherCAT New Generation ESI V2

zip • 10,5 KB • Japanese, English

Software EDS for CDGxxxD

zip • 7,6 KB • English

Software GSD for CDGxxxD

zip • 1,6 KB • English

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