Capacitance Manometers
Spot™ CDS500D
Full scale 10 … 1000 Torr / mbar
Drop-in Options
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The Spot CDS500D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems.
The miniature sensor offers a high accuracy and the alumina ceramic cell and the weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration.
The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.
Advantages
- The miniature sensor offers a high accuracy
- Excellent repeatability and long-term stability
- Weldable feedthrough for custom integration and calibration, or welded custom flange for integration of factory calibrated sensor
- Sensor electronics with SPI interface for easy integration
- Fast response time
Typical applications
- For integration into custom vacuum instrumentation and systems
Specifications
100 Torr
100 Torr
Accuracy | 0.5 % of reading |
Resolution | 0.01 % FS |
Materials exposed to vacuum | ceramics (AI2O3), stainless steel (AISI 316L) |
Downloads
3D Step Files
The product is used in the following markets