Capacitance Manometers
Spot™ CDS530D
Full scale 10 … 1000 Torr / mbar
Drop-in Options
Revolutionize your vacuum gauge experience with us!
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
The Spot CDS530D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems.
The dual miniature sensor offers a high accuracy in a wide measurement range and the alumina ceramic cells and the weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration.
The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.
Advantages
- The dual miniature sensor offers a high accuracy in a wide measurement range
- Wide range, high precision
- Excellent repeatability and long-term stability
- Sensor electronics with SPI interface for easy integration
- Welded custom flange for integration of calibrated sensor
- Fast response time
Specifications
100 Torr
100 Torr
| Accuracy | 0.5 % of reading |
| Resolution | 0.01 % FS |
| Materials exposed to vacuum | ceramics (AI2O3), stainless steel (AISI 316L) |
Downloads
3D Step Files
The product is used in the following markets
