Capacitance Manometers

Stripe® CDG100Dhs

100°C temperature controlled, full scale 0.1 … 1000 Torr / mbar

Stripe®-CDGxxx
Drop-in Options

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Gemini™ MxG5xx

Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Your configuration
inficon-gauge
Gemini™ MxG5xx
Flange
DN 16 ISO-KF
Switching functions
None
Electrical Connection
FCC, 8-pin
Digital Interface
None
Measurement range
1.2 - 8.68 V
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Personal information
Product
inficon-gauge
Gemini™ MxG5xx
Gemini™ MAG500
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INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. 

The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. 

INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.

Advantages

  • High productivity – Faster than 2 ms response time
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90 ppm/year full scale stability

Typical applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications

Specifications

1000 ... 500 Torr / mbar
200 ... 1 Torr / mbar
0.5 ... 0.1 Torr / mbar
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms2 ... 20
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Accuracy % of reading0.2
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms2 ... 20
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
Accuracy % of reading0.4
Resolutionpercent FS0.003
Output signal (analog)V (dc)0 … +10
Response time ms2 ... 20
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L)
   
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Part Number

Stripe® CDG100Dhs Ordering Information
Stripe® CDG100Dhs Ordering Information

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