Vacuum Switch
VSC150A
Setpoint range 0.5 … 2000 mbar
Drop-in Options
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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The INFICON Vacuum Switch VSC150 is a absolute pressure switch with a adjustable electrical switching contact from 0.5 to 2000 mbar.
The mechanical design allows a short therm overload of 3000 mbar without any impairing the switching accuracy of ± 0.1 mbar. INFICON offers customer specific adjustment of pressure switch.
Features
- Switching contacts (normally closed) in the reference chamber and thus protected against process media
- Increased switching capability when using switching amplifier
- Adapter available for differential pressure measurement
Advantages
- High switching accuracy (± 0.1 mbar)
- Stable long term operating characteristics
- Rugged, corrosion protected design
Typical Applications
- Pressure switch or differential pressure switch to control valves, pumps, power supplies
- Load lock chambers
- Process chambers
Specifications
Switching range | mbar | 0.5 … 2000 |
Materials in contact with the medium | bar (absolute) | 5 |
Sensing volume | Sensing volume | Stainless steel 1.4301, 1.4401, 1.4310, 1.3541, FPM75 |
Reference volume | Reference volume | Stainless steel 1.4301, 1.4401, 1.3541, glass, gold |
Overload limit | mbar | 3000 |
Switching hysteresis | mbar | 0.5 |
Protection category | IP 65 |
Part Number
Part Number
Accessories
Part Number | Description |
399-005 | VSC150 Vacuum Switch |
Part Number | Description |
399-008 | Switching Amplifer for VSC150 |
399-006 | Setpoint-adjustment for VSC150 |
399-007 | Differentialpressure-Adapter for VSC150 |
Dimensions
Downloads
Datasheets
VSC150A absolute switch, passiv DE
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329,4 KB
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German
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Datasheets
VSC150A absolute switch, passiv ES
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328,7 KB
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Spanish
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Datasheets
VSC150A absolute switch, passiv JA
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451,9 KB
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Japanese
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Datasheets
VSC150A absolute switch, passiv KO
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374,2 KB
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Korean
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Datasheets
VSC150A absolute switch, passiv ZH
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428,0 KB
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Chinese
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Datasheets
VSC150A absolute switch, passiv
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99,8 KB
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English
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Datasheets
Dimension Drawings
Manuals