Vacuum Switch
VSD200
Setpoint range ambient -100 … +50 Torr
Drop-in Options
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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INFICON Vacuum Switches are designed for accurate and reliable pressure detection. These robust electronic switches are used in all vacuum applications, including pressure interlock.
The switches are available in two versions, absolute (references vacuum) or differential (references ambient).
Features
- IP 44 protection
- Relay output with potential free contacts
- High-accuracy temperature compensated sensor
- Application pressure range 1×10-9 mbar … 2 bar
Advantages
- Corrosion resistant all stainless steel design
- Robust design, cleanroom compliant
- Easy installation with setpoints factory preset or field-adjustable
Typical Applications
- Atmospheric pressure detection for all vacuum applications
- Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
- Vacuum to high vacuum
Specifiaction
-100 ... +50 Torr
-100 ... +50 mbar
Setpoint range | mbar Torr | – –99 … +46 |
Relay output | Relay output | n.o., n.c., potential free |
Setpoint accuracy | Torr | ±0.75 |
Materials exposed to vacuum | stainless steel | |
Hysteresis | Torr | 3 |
Setpoint range | mbar Torr | –99 … +46 – |
Relay output | Relay output | n.o., n.c., potential free |
Setpoint accuracy | Torr | ±0.75 |
Materials exposed to vacuum | stainless steel | |
Hysteresis | Torr | 3 |
Part Number
Downloads
Datasheets
VSD200 差动开关 数据表
pdf
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455,8 KB
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Chinese
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Datasheets
VSD200 差動スイッチ データシート
pdf
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479,5 KB
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Japanese
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Datasheets
VSD200 차압 스위치 데이터시트
pdf
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411,0 KB
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Korean
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Datasheets
VSA200 VSD200 Vacuum Switch Datasheet
pdf
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2,3 MB
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English
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Datasheets
VSD200 Differenzialschalter Datenblatt
pdf
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382,5 KB
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German
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Datasheets
VSD200 Interruptor diferencial Ficha de datos
pdf
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423,7 KB
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Spanish
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Datasheets
Dimension Drawings
Manuals
The product is used in the following markets