ピラニゲージ
PSG50x & PSG51x
ATM To Medium Vacuum Gauge
ACADEMY
関連製品について無料のウェビナーにご興味ありますか。
Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
Request
Your configuration has been successfully sent!
INFICONのピラニ標準ゲージ PSG500、PSG502-S、 PSG510-S、 PSG512-Sは、市場において最も進んだデジタルピラニ技術を採用しています。ステンレス製の堅牢なセンサセルやコンパクト設計により、半導体システムでの使用や、補助真空側配管などの一般用途に最適です。
利点
- 操作が簡単な押しボタン式ATMおよびHV調整
- コンパクトで堅牢な設計
- アルミハウジング
- 取付け方向が自在
- 金属封止型のステンレス製測定セル
- 対数出力信号により統合が容易
- 絶対圧10 bar超過用ねじ接続
- 250 °Cでのベーキングが可能なバージョン
- 耐腐食性ニッケルフィラメントをオプションで選択可能
- 腐食性のある作業にはセラミックフィードスルー（PSG510と PSG512)
- オプションのセットポイント
- RoHSコンプライアンス
標準的なアプリケーション
- 高真空電離真空計の制御
- 真空圧力のモニタリング
- 真空システム内の安全回路
- 一般的な真空計測と高真空から低真空までの真空範囲のコントロール
仕様
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | ‒ |
| Hysteresis | % of reading | ‒ |
| Relay contact | ‒ | |
| Relay contact: Switching time | ms | ‒ |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
品番
アクセサリー
スペアパーツ
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8" NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2" Tube |
| 350-064 | PSG500 8-VCR (1/2") |
| 350-065 | PSG500 4-VCR (1/4") |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8" NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2" Tube |
| 350-084 | PSG500-S 8-VCR (1/2") |
| 350-085 | PSG500-S 4-VCR (1/4") |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8" NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2" Tube |
| 350-144 | PSG502-S 8-VCR (1/2") |
| 350-145 | PSG502-S 4-VCR (1/4") |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
| PSG500 tungsten | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500-S tungsten, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG502-S nickel, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500 tungsten | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG500-S tungsten, setpoints | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG502-S nickel, setpoints | |
| 350-900 | PSG502 Spare Sensor DN 16 KF |
| 350-901 | PSG502 Spare Sensor 1/8" NPT |
| 350-902 | PSG502 Spare Sensor DN 16 CF-R |
| 350-903 | PSG502 Spare Sensor 1/2" Tube |
| 350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
| 350-905 | PSG502 Spare Sensor 7/16-20 UNF |
| 350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
| 350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
| 350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-930 | PSG510 Spare Sensor DN 16 KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-940 | PSG512 Spare Sensor DN 16 KF |
ダウンロード
取扱説明書
3Dファイル
350-060 PSG500 DN 16 ISO-KF
zip
•
195,3 KB
•
3Dファイル
350-061 PSG500 1/8" NPT
zip
•
271,2 KB
•
3Dファイル
350-062 PSG500 DN 16 CF-R
zip
•
284,1 KB
•
3Dファイル
350-063 PSG500 1/2" tube
zip
•
265,9 KB
•
3Dファイル
350-064 PSG500 8 VCR®
zip
•
279,6 KB
•
3Dファイル
350-065 PSG500 4 VCR®
zip
•
278,4 KB
•
3Dファイル
350-066 PSG500 7/16-20 UNF
zip
•
277,9 KB
•
3Dファイル
350-067 PSG500 DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-068 PSG500 DN 16 CF-R long tube
zip
•
295,4 KB
•
3Dファイル
350-072 PSG500 G1/8"
stp
•
2,2 MB
•
3Dファイル
350-080 PSG500-S DN 16 ISO-KF
zip
•
319,0 KB
•
3Dファイル
350-081 PSG500-S 1/8" NPT
zip
•
342,8 KB
•
3Dファイル
350-082 PSG500-S DN 16 CF-R
zip
•
355,3 KB
•
3Dファイル
350-083 PSG500-S 1/2" tube
zip
•
337,7 KB
•
3Dファイル
350-084 PSG500-S 8 VCR®
zip
•
351,4 KB
•
3Dファイル
350-085 PSG500-S 4 VCR®
zip
•
350,3 KB
•
3Dファイル
350-086 PSG500-S 7/16-20 UNF
zip
•
349,7 KB
•
3Dファイル
350-087 PSG500-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-088 PSG500-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3Dファイル
350-140 PSG502-S DN 16 ISO-KF
zip
•
295,4 KB
•
3Dファイル
350-141 PSG502-S 1/8" NPT
zip
•
342,8 KB
•
3Dファイル
350-142 PSG502-S DN 16 CF-R
zip
•
355,3 KB
•
3Dファイル
350-143 PSG502-S 1/2" tube
zip
•
337,7 KB
•
3Dファイル
350-144 PSG502-S 8 VCR®
zip
•
351,4 KB
•
3Dファイル
350-145 PSG502-S 4 VCR®
zip
•
350,3 KB
•
3Dファイル
350-146 PSG502-S 7/16-20 UNF
zip
•
349,7 KB
•
3Dファイル
350-147 PSG502-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3Dファイル
350-148 PSG502-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3Dファイル