キャパシタンスマノメーター

Spot™ CDS500D

フルスケール 10 ... 1000 Torr / mbar

ACADEMY

関連製品について無料のウェビナーにご興味ありますか。

ウェビナー参加はこちらから

スポット CDS500D セラミックキャパシタンスダイアフラムセンサは、お客様の真空装置やシステムの限られたスペースに組み込むために設計されています。

小型センサーは高精度を提供し、アルミナセラミックセルと溶接可能なステンレス鋼フィードスルーはすべてアルミナコーティングされています。センサーの電子回路は、デジタルSPIインターフェースを備えており、簡単に統合できます。

このセンサーは、圧力変化に即座に反応する高速データサイクル時間、優れた再現性、長期安定性を特徴としています。

利点

高精度を提供する小型センサー
優れた再現性と長期安定性
統合と較正のカスタマイズが可能な溶接フィードスルー、または工場較正済みセンサー統合のためのカスタム溶接フランジ
容易な統合および安全な通信を可能にするSPIインターフェース搭載センサー電子回路
すばやい応答時間
高超過圧機能

標準的なアプリケーション

カスタム真空計測装置およびシステムへの統合が可能

仕様

100 Torr

Accuracy	0.5 % of reading

Resolution	0.01 % FS

Materials exposed to vacuum	ceramics (AI₂O₃), stainless steel (AISI 316L)

仕様の詳細はこちらからダウンロードできます。

ダウンロード

データシート

Spot™ CDS500D Datasheet

pdf • 337,2 KB • 英語版 • データシート

取扱説明書

Spot™ CDS500D CDS530D OEM Sensor SPI-Interface Specification Communication Protocol

pdf • 367,3 KB • 英語版 • 取扱説明書

3D Step Files

Spot™ CDS500D 3D Surface Mount Flex

stp • 3,0 MB • 3Dファイル

Spot™ CDS500D 3D Surface Mount JST

stp • 3,4 MB • 3Dファイル

その他

Spot™ Demonstrator EXE

exe • 5,0 MB • 英語版

SPOT Demonstrator Manual

pdf • 349,7 KB • 英語版

本製品は以下のマーケットで使用されています。

ディスプレイ

INFICONは最先端の技術をサポートし、最高品質のディスプレイ製品を実現します。

詳細はこちら

製薬・メディカル

生産性を向上させ、製薬会社のコンプライアンス標準と品質要件を満たすお手伝いをします

詳細はこちら

半導体IDM＆ファウンドリ

幅広いアプリケーションをサポートするために作られたセンサは、製品の安全性、歩留まりの向上、そして最大の生産性を保証します。

詳細はこちら

半導体製造装置メーカー

半導体産業は、データ処理、通信、家電、自動車、航空宇宙などで使用される集積回路の設計、製造、組立、テストから構成されています。

詳細はこちら

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